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浏览/检索结果: 共5条，第1-5条 帮助 限定条件 学科主题：微电子学     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 A low feed-through 3D vacuum packaging technique with silicon vias for RF MEMS resonators 期刊论文 journal of micromechanics and microengineering, 2016, 卷号: 27, 期号: 1, 页码: 014003 Jicong Zhao; Quan Yuan; Xiao Kan; and Jinling Yang; Fuhua Yang 收藏  |  浏览/下载：13/0  |  提交时间：2017/03/16 Formation of silicon nanocrystals embedded in high-kappa dielectric HfO2 and their application for charge storage 期刊论文 journal of vacuum science & technology b, 2011, 卷号: 29, 期号: 2, 页码: article no.21018 Li WL; Jia R; Chen C; Li HF; Liu XY; Yue HH; Ding WC; Ye TC; Kasai S; Hashizume T; Wu NJ; Xu BS 收藏  |  浏览/下载：38/2  |  提交时间：2011/07/05 SI NANOCRYSTALS  MEMORY  TECHNOLOGY  DEPOSITION  VOLTAGE  LAYER   Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load 期刊论文 journal of microelectromechanical systems, 2011, 卷号: 20, 期号: 1, 页码: 178-183 Zhu YF; Zhang FX; Yang JL; Zheng HY; Yang FH 收藏  |  浏览/下载：52/8  |  提交时间：2011/07/06 Cyclic  mechanical property  resonant frequency  stability  submicrometer-thick cantilever  ENERGY-DISSIPATION  STRUCTURAL FILMS  THIN-FILMS  FATIGUE   Enhanced charge storage characteristics of silicon nanocrystals fabricated by electron-beam coevaporation of Si and SiOx(x=1 or 2) 期刊论文 journal of vacuum science & technology b, 2009, 卷号: 27, 期号: 6, 页码: 2462-2467 Chen C (Chen Chen); Jia R (Jia Rui); Li WL (Li Weilong); Li HF (Li Haofeng); Ye TC (Ye Tianchun); Liu XY (Liu Xinyu); Liu M (Liu Ming); Kasai S (Kasai Seiya); Tamotsu H (Tamotsu Hashizume); Wu NJ (Wu Nanjian) 收藏  |  浏览/下载：139/35  |  提交时间：2010/03/08 electron beam deposition   In-situ Boron-doped Low-stress LPCVD Polysilicon for Micromechanical Disk Resonator 会议论文 9th international conference on solid-state and integrated-circuit technology, beijing, peoples r china, oct 20-23, 2008 Liu, YF; Xie, J; Yang, JL; Tang, LJ; Yang, FH 收藏  |  浏览/下载：31/0  |  提交时间：2010/03/09 FILMS