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The compact microcrystalline Si thin film with structure uniformity in the growth direction by hydrogen dilution profile 期刊论文
journal of applied physics, 2005, 卷号: 98, 期号: 9, 页码: art.no.093505
Gu J; Zhu MF; Wang LJ; Liu FZ; Zhou BQ; Zhou YQ; Ding K; Li GH
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