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浏览/检索结果: 共5条，第1-5条 帮助 限定条件 发表日期：2006     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Evaluating interface effect on stresses in thin films by a local curvature metrology with high accuracy and resolution 其他 2006-01-01 Wang, Shasha; Chen, Jing; Li, Dachao; Huang, Yubo; Li, Zhihong; Zhang, Wendong 收藏  |  浏览/下载：2/0  |  提交时间：2015/11/16 AEMS  residual stress  nano-scale film  interferometry measurement   MEMS inductor consisting of suspended thick crystalline silicon spiral with copper surface coating 期刊论文 pan tao ti hsueh paochinese journal of semiconductors, 2006 Wu, Wengang; Li, Yi; Huang, Fengyi; Han, Xiang; Zhang, Shaoyong; Li, Zhihong; Hao, Yilong 收藏  |  浏览/下载：4/0  |  提交时间：2015/11/13 Highly sensitive local curvature metrology for internal stress detection in thin films 期刊论文 pan tao ti hsueh paochinese journal of semiconductors, 2006 Wang, Shasha; Chen, Jing; Li, Dachao; Huang, Yubo; Li, Zhihong 收藏  |  浏览/下载：1/0  |  提交时间：2015/11/13 Formation of beta-C3N4 nanocrystals in Ti-doped carbon nitride films prepared by cathode arc-assisted middle-frequency magnetron sputtering 期刊论文 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2006, 卷号: 45, 期号: 20-23 作者:  Huang, Zhihong;  Yang, Bing;  Fan, Xiangjun;  Fu, Dejun 收藏  |  浏览/下载：3/0  |  提交时间：2019/12/05 carbon nitride  film  nanocrystal  TEM  magnetron sputter   Tolerance study based on growth design 期刊论文 Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering, 2006, 卷号: 42, 期号: SUPPL., 页码: 143-147 作者:  Zhang, Yong;  Huang, Kezheng;  Gao, Changqing;  Yang, Zhihong 收藏  |  浏览/下载：0/0  |  提交时间：2020/01/03 Functional surface  Growth design  Tolerance  Tolerance synchronous design