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长春光学精密机械与物... [2]
高能物理研究所 [1]
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会议论文 [2]
期刊论文 [1]
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2010 [1]
2006 [1]
2004 [1]
学科主题
Physics [1]
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Theoretical and experimental results of focusing performance for the parabolic compound X-ray refractive lenses
期刊论文
ACTA PHYSICA SINICA, 2010, 卷号: 59, 期号: 3, 页码: 1977-1984
作者:
Le, ZC
;
Dong, W
;
Liu, W
;
Zhang, M
;
Liang, JQ
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  |  
浏览/下载:22/0
  |  
提交时间:2016/06/29
X-ray optics
compound X-ray refractive lens
X-ray focusing
synchrontron radiation
The study on the epoxy resin compound X-ray refractive lens (EI CONFERENCE)
会议论文
ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China
Liang J.
;
Le Z.
;
Peng L.
;
Wang W.
;
Yi F.
;
Quan B.
;
Yao J.
;
Zhang J.
;
Dong W.
;
Xuan M.
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  |  
浏览/下载:18/0
  |  
提交时间:2013/03/25
In this paper
the authors report their resent results of the study on the epoxy resin compound X-ray refractive lens. At the first
the theoretical results of the structure parameters for such a device are given. Then
the fabrication technologies are presented. They are deep soft X-ray lithography
mold-manufacturing and molding. The material of X-ray photoresist is PMMA
the mold is made of silicone rubber
and the material of the lens is epoxy resin. Some measured results by means of optical microscope and SEM are also shown. The structure height of the epoxy resin compound lens is measured to be 500 micrometers.
The study on the compound X-ray refractive lens using LIGA technique (EI CONFERENCE)
会议论文
MEMS/MOEMS Technologies and Applications II, November 10, 2004 - November 12, 2004, Beijing, China
Liang J.
;
Le Z.
;
Peng L.
;
Wang W.
;
Lan W.
;
Ming A.
;
Yi F.
;
Ye J.
;
Quan B.
;
Yao J.
;
Xuan M.
;
Wang L.
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浏览/下载:14/0
  |  
提交时间:2013/03/25
A theoretical method of focusing X-rays by the compound X-ray refractive lens is presented in this paper. The authors report their resent theoretical results including the material selection and structure parameters for such a device. As an example
a compound X-ray refractive lens with PMMA material is designed. The detailed fabrication process of the PMMA compound lens by LIGA technology is described. Moreover
some measured results by means of SEM are also shown. The structure height of one of the PMMA compound lens is measured to be 500m.
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