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长春光学精密机械与物... [1]
紫金山天文台 [1]
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会议论文 [1]
期刊论文 [1]
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2010 [1]
2005 [1]
学科主题
Optics [1]
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Deep phase modulation interferometry
期刊论文
OPTICS EXPRESS, 2010, 卷号: 18, 期号: 18, 页码: 19076-19086
作者:
Heinzel, Gerhard
;
Cervantes, Felipe Guzman
;
Marin, Antonio F. Garcia
;
Kullmann, Joachim
;
Feng, Wang
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浏览/下载:13/0
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提交时间:2011/11/23
HETERODYNE INTERFEROMETER
OPTICAL INTERFEROMETERS
SHIFTING INTERFEROMETRY
AUTOMATIC ALIGNMENT
LTP INTERFEROMETER
READOUT
ACCURACY
SENSOR
SYSTEM
NOISE
Developing of in-suit long trance profiler for testing slope error of aspherical optical Elements (EI CONFERENCE)
会议论文
ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China
Zhou C.
;
Li H.
;
Chen C.
;
Zhou C.
;
Qian S.
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提交时间:2013/03/25
Profile error of super smooth surface of optical elements at X-ray/EUV in synchrotron radiation (SR) light beam line is described as slope error of them generally. The Long Trace Profiler (LPT) is used for testing surface slope error of SR optical elements in world generally. It is requisite to use In-suit LTP measuring surface thermal distortion of SR optical elements with high heat under high bright SR source. Authors design an In-suit LTP by means of co-path interferometer with pencil light beam. The instrument not only can be used for testing slope error of mirrors in Lab. also in situation test the distortion of mirror with high heat load at synchrotron light beam line. The device can be used to test various absolute surface figures of optical elements such as aspherieal
spherical and plane. It is needless standard reference surface. It is named by LTP-III. This paper describes its basic operating principle
optical system
mechanical constructions
DC serve motor control system
array detector
data acquisition system and computer system for controlling and data analysis of LTP-III. The Instrument has advantages of high accuracy
low cost
multifunction and wide application. Length of surface measured of optical element accuracy is 0.04 arcsec.
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