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Striations in dual-frequency capacitively coupled CF4 plasmas: the role of the high-frequency voltage amplitude 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2019, 卷号: 28
作者:  Liu, Yong-Xin;  Donko, Zoltan;  Korolov, Ihor;  Schungel, Edmund;  Wang, You-Nian
收藏  |  浏览/下载:10/0  |  提交时间:2019/12/02
Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2017, 卷号: 26
作者:  Liu, Yong-Xin;  Korolov, Ihor;  Schuengel, Edmund;  Wang, You-Nian;  Donko, Zoltan
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/02
Striations in electronegative capacitively coupled radio-frequency plasmas: Effects of the pressure, voltage, and electrode gap 期刊论文
PHYSICS OF PLASMAS, 2017, 卷号: 24, 页码: -
作者:  Liu, Yong-Xin;  Korolov, Ihor;  Schungel, Edmund;  Wang, You-Nian;  Donko, Zoltan
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/02
Experimental Observation and Computational Analysis of Striations in Electronegative Capacitively Coupled Radio-Frequency Plasmas 期刊论文
PHYSICAL REVIEW LETTERS, 2016, 卷号: 116, 页码: 255002
作者:  Liu, Yong-Xin;  Schungel, Edmund;  Korolov, Ihor;  Donko, Zoltan;  Wang, You-Nian
收藏  |  浏览/下载:2/0  |  提交时间:2019/12/09


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