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浏览/检索结果: 共2条，第1-2条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Modelling and characterisation of a micromachined resonant pressure sensor with piezoelectric excitation and sensing 期刊论文 MICRO & NANO LETTERS, 2016, 卷号: 11, 期号: [db:dc_citation_issue], 页码: 326-331 作者:  Cheng, Rongjun;  Zhao, Yulong;  Li, Cun;  Li, Bo;  Zhang, Qi 收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02 micromachined resonant pressure sensor  quartz resonator  micropressure measurement  piezoelectric excitation  electronics packaging  double enhancement beam  micromachining  quality factor  micromachined diaphragm  microsensors  crystal resonators  piezoelectric transducers  finite element method  finite element analysis  piezoelectric sensor  temperature 293 K to 298 K  diaphragms  Q-factor measurement  pressure sensors  pressure-10 kPa to 10 kPa  self-excitation circuit design   Non-steady flow method for measuring the micro flow at constant micropressure 期刊论文 Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2009, 卷号: 45, 期号: 5, 页码: 204-208 作者:  Wei, Liejiang;  Ji, Hong;  Li, Shaonian;  Qiang, Yan;  Wei, Zhongying 收藏  |  浏览/下载：9/0  |  提交时间：2020/11/14 Differential equations  MATLAB  Measurement methods  Micro-flow  Micropressrue  Non steady flow  Precision