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浏览/检索结果: 共6条，第1-6条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 A Two-Step Global Maximum Error Controller-Based TPWL MOR with POD Basis Vectors and Its Applications to MEMS 其他 2017-01-01 Liu, Ying; Wang, Xiaodong 收藏  |  浏览/下载：1/0  |  提交时间：2017/12/03 MODEL-ORDER REDUCTION  PIECEWISE-LINEAR APPROXIMATION  NONLINEAR DESCRIPTOR SYSTEMS  FAST SIMULATION  CIRCUITS  DEVICES  DECOMPOSITION   Modelling and characterisation of a micromachined resonant pressure sensor with piezoelectric excitation and sensing 期刊论文 MICRO & NANO LETTERS, 2016, 卷号: 11, 期号: [db:dc_citation_issue], 页码: 326-331 作者:  Cheng, Rongjun;  Zhao, Yulong;  Li, Cun;  Li, Bo;  Zhang, Qi 收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02 micromachined resonant pressure sensor  quartz resonator  micropressure measurement  piezoelectric excitation  electronics packaging  double enhancement beam  micromachining  quality factor  micromachined diaphragm  microsensors  crystal resonators  piezoelectric transducers  finite element method  finite element analysis  piezoelectric sensor  temperature 293 K to 298 K  diaphragms  Q-factor measurement  pressure sensors  pressure-10 kPa to 10 kPa  self-excitation circuit design   TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer 期刊论文 MICROELECTRONIC ENGINEERING, 2012, 卷号: 91, 页码: 167-173 Wei, CZ; Zhou, W; Wang, Q; Xia, XY; Li, XX 收藏  |  浏览/下载：26/0  |  提交时间：2013/04/23 Automotive sensor  Pressure sensor  Accelerometer  Piezoresistance  Surface-micromachining  Self-testing   Micro thermal shear stress sensor based on vacuum anodic bonding and bulk-micromachining 外文期刊 2008 作者:  Yi, L;  Ou, Y;  Shi, SL;  Ma, J;  Chen, DP 收藏  |  浏览/下载：7/0  |  提交时间：2010/11/26 Biosensors based on flexural mode piezo-diaphragm 会议论文 作者:  Wang, Zhihong;  Miao, Jianmin;  Xu, Ting;  Yu, Ling;  Li, Chang Ming 收藏  |  浏览/下载：4/0  |  提交时间：2019/12/18 Flexural vibration modes  Frequency shift  Mass sensitivity  Micromachined diaphragm  Multilayer structures  Operating frequency  Sensor surfaces  Vibration modes   Design and simulation of a novel MEMS fluidic angular rate gyroscope 其他 2004-01-01 Zhou, J; Yang, K; Yan, GZ 收藏  |  浏览/下载：2/0  |  提交时间：2015/11/16 fluidic angular rate gyroscope  MEMS  micromachined  finite element method1