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浏览/检索结果: 共3条，第1-3条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Structure design of a high-performance aluminum nitride differential resonant accelerometer 期刊论文 Proceedings of SPIE - The International Society for Optical Engineering, 2017, 卷号: 10605, 页码: 1060519 作者:  Lei, Qiang;  Gao Y(高扬);  Gao, Yang;  Zhang, Da-Peng 收藏  |  浏览/下载：12/0  |  提交时间：2019/08/29 resonant accelerometer  aluminium nitride  microleverage  supporting beam  differential frequency detection   Structure design of a high-performance aluminum nitride differential resonant accelerometer 期刊论文 Proceedings of SPIE - The International Society for Optical Engineering, 2017, 卷号: 10605, 页码: 1060519 作者:  Lei, Qiang;  Gao Y(高扬);  Gao, Yang;  Zhang, Da-Peng 收藏  |  浏览/下载：13/0  |  提交时间：2019/08/27 resonant accelerometer  aluminium nitride  microleverage  supporting beam  differential frequency detection   Design and fabrication of a silicon probe for surface profilers 期刊论文 microsystem technologies micro and nanosystems information storage and processing systems, 2013 Jiang, Senlin; Zhang, Dacheng; Lin, Longtao; Yang, Zhenchuan; Zhao, Qiancheng; Yan, Guizhen 收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10 FORCE  STRESS