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Magnetic and Pressure Effects on E-H Mode Transition Power and Electron Energy Distribution in Helical Antenna-Coupled RF Plasma 期刊论文
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2021, 卷号: 49, 期号: 9, 页码: 2806-2816
作者:  Wang CS(王传胜);  Liu, Xuhui;  Geng, Jinyue;  Li F(李飞);  Lin X(林鑫)
收藏  |  浏览/下载：13/0  |  提交时间：2021/11/01
Simulation of Discharge Characteristics for the Plasma Etching of Large Area SiO2 Substrates 期刊论文
JOURNAL OF RUSSIAN LASER RESEARCH, 2020, 卷号: 41, 期号: 3, 页码: 258-267
作者:  Zhang JW(张景文)
收藏  |  浏览/下载：11/0  |  提交时间：2020/11/30
Simulation of Discharge Characteristics for the Plasma Etching of Large Area SiO2 Substrates 期刊论文
JOURNAL OF RUSSIAN LASER RESEARCH, 2020, 卷号: 41, 期号: 3, 页码: 258-267
作者:  Zhang, Jingwen;  Fan, Bin;  Li, Zhiwei;  Gao, Guohan;  Li, Bincheng
收藏  |  浏览/下载：28/0  |  提交时间：2021/05/11
Experimental investigation of the electron impact excitation behavior in pulse-modulated radio frequency Ar/O-2 inductively coupled plasma 期刊论文
JOURNAL OF APPLIED PHYSICS, 2019, 卷号: 125
作者:  Xue, Chan;  Gao, Fei;  Wen, De-Qi;  Wang, You-Nian
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02
Study on Effect of Neutral Gas Pressure on Plasma Characteristics in Capacitive RF Argon Glow Discharges at Low Pressure by Fluid Modeling 期刊论文
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2018, 卷号: 46, 页码: 1738-1746
作者:  Samir, Tagra;  Liu, Yue;  Zhao, Lulu
收藏  |  浏览/下载：9/0  |  提交时间：2019/12/02
Influence of dielectric materials on uniformity of large-area capacitively coupled plasmas for N-2/Ar discharges 期刊论文
CHINESE PHYSICS B, 2016, 卷号: 25
作者:  Liang, Ying-Shuang;  Zhang, Yu-Ru;  Wang, You-Nian
收藏  |  浏览/下载：2/0  |  提交时间：2019/12/09
Determining the electron temperature and the electron density by a simple collisional-radiative model of argon and xenon in low-pressure discharges 期刊论文
2010, 2010
Zhu, Xi-Ming; Chen, Wen-Cong; Li, Jiang; Pu, Yi-Kang
收藏  |  浏览/下载：125/0
Characteristics of atmospheric-pressure, radio-frequency glow discharges operated with argon added ethanol 期刊论文
2010, 2010
Sun, Wen-Ting; Li, Guo; Li, He-Ping; Bao, Cheng-Yu; Wang, Hua-Bo; Zeng, Shi; Gao, Xing; Luo, Hui-Ying
收藏  |  浏览/下载：6/0
Influence of discharge parameters on tuned substrate self-bias in an radio-frequency inductively coupled plasma 期刊论文
PLASMA SCIENCE & TECHNOLOGY, 2005, 卷号: 7, 页码: 3117-3121
作者:  Ding, ZF;  Sun, JC;  Wang, YN
收藏  |  浏览/下载：4/0  |  提交时间：2020/01/02
Langmuir probe potential measurements for reduced-pressure inductively coupled plasma mass spectrometry 期刊论文
1997
Yan, XM; 颜晓梅; Huang, BL; 黄本立; Tanaka, T; Kawaguchi, H
收藏  |  浏览/下载：1/0  |  提交时间：2012/08/14

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