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Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect
期刊论文
Microsystem Technologies, 2017, 卷号: 23, 期号: 2, 页码: 411-419
作者:
Wang, Weimin
;
Tao, Fenggang
;
Wang, Qiang
;
Qiu, Chuankai
;
Chen, Zexiang
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2018/11/20
Accelerometers - Actuators - Damping - Dynamic models - Micromachining - Stiffness - Surface micromachining
Signal demodulation research of a frequency output resonant gyroscope based on instantaneous frequency analysis
期刊论文
IET SCIENCE MEASUREMENT & TECHNOLOGY, 2017, 卷号: 11, 页码: 1079-1084
作者:
Zhao, Chen
;
Fan, Shangchun
;
Sun, Jinhao
;
Cao, Le
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/12/30
gyroscopes
microsensors
vibrations
Hilbert transforms
demodulation
signal demodulation research
frequency output resonant gyroscope
instantaneous frequency analysis
detection elements
double-ended tuning forks
vibratory response
instantaneous frequency analysis
Hilbert transform
DSP
test circuit board
correlation coefficient
Force rebalance control for a MEMS gyroscope using ascending frequency drive and generalized PI control
其他
2016-01-01
He, Chun-Hua
;
Huang, Qin-Wen
;
Zhao, Qian-Cheng
;
Yang, Zhen-Chuan
;
Zhang, Da-Cheng
;
Yan, Gui-Zhen
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2017/12/03
MEMS gyroscope
mode-matching
force rebalance control
ascending frequency drive
electrical coupling suppressing
VIBRATORY GYROSCOPES
SENSE MODE
A novel narrow-band force rebalance control method for the sense mode of MEMS vibratory gyroscopes
期刊论文
measurement, 2015
He, C. H.
;
Liu, D. C.
;
Zhao, Q. C.
;
En, Y. F.
;
Yang, Z. C.
;
Zhang, D. C.
;
Yan, G. Z.
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2015/11/10
MEMS gyroscope
Closed loop control
Sense mode
Narrow band
Demodulation
DELTA-SIGMA-MODULATORS
DESIGN
PERFORMANCE
Dynamics and Robust Control of an Underactuated Torsional Vibratory Gyroscope Actuated by Electrostatic Actuator
期刊论文
IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2015
He, Guangping
;
Geng, Zhiyong
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2017/12/03
Dynamics
linear matrix inequalities (LMIs)
MEMS gyroscopes
robust control
underactuation
MICROMACHINED GYROSCOPES
MODE
OBSERVER
STABILIZATION
SYSTEMS
DESIGN
Dynamic behavior of perforated parallel-plate actuator under squeeze film damping effect
期刊论文
Microsystem Technologies, 2015
作者:
Wang, Weimin
;
Tao, Fenggang
;
Wang, Qiang
;
Qiu, Chuankai
;
Chen, Zexiang
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2016/11/22
Research and development of micromachined gyroscopes
会议论文
3rd International Conference on Manufacturing Engineering and Technology for Manufacturing Growth (METMG 2015), 2015-01-01
-
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/23
Micromachined gyroscopes
vibratory gyroscopes
inertial microsensors
MEMS
Digital signal processing for a micromachined vibratory gyroscope based on a three dimensional adaptive filter demodulator
期刊论文
measurement, 2014
Liu, Dachuan
;
He, Chunhua
;
Zhao, Qiancheng
;
Yang, Zhenchuan
;
Hao, Yilong
;
Yan, Guizhen
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2015/11/10
Gyroscope
Quadrature demodulation
Adaptive filter demodulator
LMS
MEMS GYROSCOPE
LOOP
SENSORS
MODE
Digital fast startup procedure for micro-machined vibratory gyroscopes using optimized fuzzy control strategy
其他
2014-01-01
Wang, Long
;
Zhao, Qiancheng
;
Nie, Minghao
;
Liu, Dachuan
;
Liu, Yuxian
;
Yan, Junjie
;
Yang, Zhenchuan
;
Yan, Guizhen
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2015/11/13
A Characterization of the Performance of MEMS Vibratory Gyroscope in Different Fields
会议论文
作者:
Wen, Ming
;
Luo, Zhang
;
Wang, Weihui
;
Liu, Sheng
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/05
electromagnetic field
MEMS gyroscopes
output deviation
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