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Influence of the Planetary Movement of Tool on the Aspect Ratio of Micro Holes Machined by Micro-Ultrasonic Machining 期刊论文
Journal of Micro and Nano-Manufacturing, 2019, 卷号: 7
作者:  Lei, Senwang;  Yu, Zuyuan;  Zhou, Kai;  Li, Jianzhong;  Kang, Renke
收藏  |  浏览/下载:16/0  |  提交时间:2019/12/02
Inductively coupled plasma etching of bulk tungsten for MEMS applications 其他
2014-01-01
Song, Lu; Li, Nannan; Zhang, Shibin; Luo, Jin; Hu, Jia; Zhang, Yiming; Chen, Shuhui; Chen, Jing
收藏  |  浏览/下载:3/0  |  提交时间:2015/11/13


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