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Study of gamma-ray irradiation influence on TiN/HfO2/Si MOS capacitor by C-V and DLTS 期刊论文
SUPERLATTICES AND MICROSTRUCTURES, 2018, 卷号: Vol.120, 页码: 313-318
作者:  Li, Yun;  Ma, Yao;  Lin, Wei;  Dong, Peng;  Yang, Zhimei
收藏  |  浏览/下载:17/0  |  提交时间:2019/02/25
Study of gamma-ray irradiation influence on TiN/HfO2/Si MOS capacitor by C-V and DLTS 期刊论文
SUPERLATTICES AND MICROSTRUCTURES, 2018, 卷号: Vol.120, 页码: 313-318
作者:  Li, Yun
收藏  |  浏览/下载:7/0  |  提交时间:2019/12/26
Understanding the role of TiN barrier layer on electrical performance of MOS device with ALD-TiN/ALD-TiAlC metal gate stacks 期刊论文
ECS Journal of Solid State Science and Technology, 2016
作者:  Xiang JJ(项金娟);  Li TT(李亭亭);  Wang XL(王晓磊);  Han K(韩锴);  Li JF(李俊峰)
收藏  |  浏览/下载:10/0  |  提交时间:2017/05/09


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