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浏览/检索结果: 共3条，第1-3条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials 期刊论文 PHYSICS OF PLASMAS, 2019, 卷号: 26 作者:  Sun, Jing-Yu;  Wen, De-Qi;  Zhang, Quan-Zhi;  Liu, Yong-Xin;  Wang, You-Nian 收藏  |  浏览/下载：16/0  |  提交时间：2019/12/02 Copper compounds  Electric discharges  Electric grounding  Electrodes  Ionization  Plasma simulation  Secondary emission  Silica  Silicon oxides, Asymmetric response  Backscattered electrons  Capacitively coupled plasmas  Grounded electrodes  Plasma characteristics  Secondary electron emissions  Secondary electron yield  Secondary electrons, Electrons   Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges 期刊论文 PLASMA SOURCES SCIENCE & TECHNOLOGY, 2019, 卷号: 28 作者:  Wang, Li;  Wen, De-Qi;  Zhang, Quan-Zhi;  Song, Yuan-Hong;  Zhang, Yu-Ru 收藏  |  浏览/下载：6/0  |  提交时间：2019/12/02 capacitively coupled oxygen plasma  secondary electron emission  striations  electron heating mode transition   Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investigation of the ionization rate 期刊论文 AIP ADVANCES, 2019, 卷号: 9 作者:  Wen, Ying-Ying;  Zhang, Yu-Ru;  Jiang, Ge;  Song, Yuan-Hong;  Wang, You-Nian 收藏  |  浏览/下载：7/0  |  提交时间：2019/12/02 Aspect ratio  Electric discharges  Energy dissipation  Etching  Ionization  Secondary emission, Capacitively coupled discharges  Discharge parameters  High-aspect-ratio-etching  Ionization rates  Plasma generation  Pressure increase  Secondary electrons  Voltage increase, Electrons