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兰州理工大学 [4]
金属研究所 [3]
兰州化学物理研究所 [3]
武汉大学 [2]
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期刊论文 [12]
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Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C: H films deposited by mid-frequency magnetron sputtering
期刊论文
Surface and Coatings Technology, 2014, 卷号: 240, 页码: 419-424
作者:
Jiang, Jinlong
;
Wang, Qiong
;
Huang, Hao
;
Wang, Yubao
;
Zhang, Xia
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2020/11/14
Amorphous carbon
Amorphous silicon
Carbon films
Magnetron sputtering
Microstructure
Rotation
Substrates
Surface morphology
a-C:H films
Hydrogenated amorphous carbon (a-C:H)
MF magnetron sputtering
Microstructure and properties
Rotary substrates
Rotating substrates
Shadowing effects
Substrate rotation
Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C:H films deposited by mid-frequency magnetron sputtering
期刊论文
SURFACE & COATINGS TECHNOLOGY, 2014, 卷号: 240, 页码: 419-424
作者:
Jiang, Jinlong
;
Wang, Qiong
;
Huang, Hao
;
Wang, Yubao
;
Zhang, Xia
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/11/15
a-C:H films
MF magnetron sputtering
Substrate rotation
Microstructure and property
Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C:H films deposited by mid-frequency magnetron sputtering
期刊论文
Surface and Coatings Technology, 2014, 卷号: 240, 页码: 419-424
作者:
Jiang JL(姜金龙)
;
Wang Q(王琼)
;
Huang H(黄浩)
;
Wang YB(王玉宝)
;
Zhang X(张霞)
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2014/12/17
a-C:H films
MF magnetron sputtering
Substrate rotation
Microstructure and property
Tribological properties of Ti, Si doped diamond-like carbon film in different atmosphere
期刊论文
Mocaxue Xuebao/Tribology, 2013, 卷号: 33, 期号: 5, 页码: 456-462
作者:
Jiang, Jin-Long
;
Huang, Hao
;
Chen, Di
;
Wang, Qiong
;
Feng, Wang-Jun
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2020/11/14
Abrasion
Adhesives
Carbon films
Diamonds
Friction
Magnetron sputtering
Scanning electron microscopy
Semiconductor doping
Tribology
Doped diamond-like carbon
Friction coefficients
High relative humidities
Low relative humidities
MF magnetron sputtering
Multi-element
Tribochemical process
Tribological properties
钛硅多元掺杂类金刚石薄膜在不同气氛环境下的摩擦学性能研究
期刊论文
摩擦学学报, 2013, 卷号: 33, 期号: 5, 页码: 456-462
作者:
姜金龙
;
黄浩
;
陈娣
;
王琼
;
冯旺军
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2014/01/02
类金刚石薄膜
多元掺杂
中频磁控溅射
气氛环境
摩擦学性能
diamond-like carbon film
multi-elements doping
MF magnetron sputtering
atmosphere environment
tribological property
Insulator-to-metal transition in heavily Ti-doped silicon thin film
期刊论文
APPLIED PHYSICS LETTERS, 2013, 卷号: 102, 期号: 22
Zhou, YR
;
Liu, FZ
;
Zhu, MF
;
Song, XH
;
Zhang, P
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2014/01/16
Properties of Infrared High Reflectance Mo Film for Solar Selective Coatings by MF Sputtering
会议论文
Chinese Materials Congress (CMC 2012), Taiyuan, PEOPLES R CHINA, 2013-01-01
作者:
Zheng, Liqing
;
Zhou, Fuyun
;
Diao, Xungang
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2020/01/06
Mo film
MF magnetron sputtering
Infrared high reflectance coating
Solar selective coating
Synthesis and characterization of quaternary Ti-Si-C-N film deposited by middle frequency magnetron sputtering
期刊论文
Advanced Materials Research, 2012, 卷号: 581-582, 页码: 540-543
作者:
Jiang JL(姜金龙)
;
Chen D(陈娣)
;
Zhu WJ(朱伟君)
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2013/07/12
Ti-Si-C-N films
microstructure
MF magnetron sputtering
Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils
期刊论文
Materials Letters, 2012, 卷号: 68, 页码: 367-369
J. H. Gao
;
L. Zhang
;
J. Q. Xiao
;
J. Gong
;
C. Sun
;
L. S. Wen
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2013/02/05
Nanocrystalline silicon
Thin films
Solenoid coil
Sputtering
microcrystalline silicon
fabrication
deposition
layer
tool
Influence of an External Magnetic Field on the Growth of Nanocrystalline Silicon Films Grown by MF Magnetron Sputtering
期刊论文
Journal of Materials Science & Technology, 2012, 卷号: 28, 期号: 11, 页码: 992-998
J. H. Gao
;
L. Zhang
;
J. Q. Xiao
;
J. Gong
;
C. Sun
;
L. S. Wen
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2013/02/05
Nanocrystalline silicon
Thin film
Solenoid coil
MF magnetron
sputtering
chemical-vapor-deposition
amorphous-silicon
thin-films
microstructure
temperature
fabrication
density
si
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