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Charge trapping effect in HfO2-based high-k gate dielectric stacks after heavy ion irradiation: The role of oxygen vacancy
期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 卷号: 459, 页码: 143-147
作者:
Li, Zongzhen
;
Liu, Tianqi
;
Bi, Jinshun
;
Yao, Huijun
;
Zhang, Zhenxing
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2022/01/19
High-k HfO2
Heavy ion irradiation
Reliability
Charge trapping
Oxygen vacancy
Latent Reliability Degradation of Ultrathin Amorphous HfO2 Dielectric After Heavy Ion Irradiation: The Impact of Nano-Crystallization
期刊论文
IEEE ELECTRON DEVICE LETTERS, 2019, 卷号: 40, 期号: 10, 页码: 1634-1637
作者:
Li, Zongzhen
;
Liu, Jie
;
Zhai, Pengfei
;
Liu, Tianqi
;
Bi, Jinshun
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2022/01/19
HfO2
heavy ion irradiation
reliability degradation
crystallization
Atomic-layer-deposited AlO passivation dependent interface chemistry, band alignment and electrical properties of HfYO/Si gate stacks
期刊论文
Journal of Materials Science & Technology, 2019, 卷号: Vol.35 No.5, 页码: 769-776
作者:
Die Wang
;
Shuang Liang
;
Fen Qiao
;
Gang He
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/04/24
AlOpassivation
layer
Co-sputtering
HYO
films
Annealing
Electrical
properties
Conduction
mechanism
Atomic-layer-deposited (ALD) Al2O3 passivation dependent interface chemistry, band alignment and electrical properties of HfYO/Si gate stacks
期刊论文
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2019, 卷号: 35, 期号: 5, 页码: 769-776
作者:
Liang, Shuang[1]
;
He, Gang[2]
;
Wang, Die[3]
;
Qiao, Fen[4]
收藏
  |  
浏览/下载:52/0
  |  
提交时间:2019/12/24
Al2O3 passivation layer
Co-sputtering HYO films
Annealing
Electrical properties
Conduction mechanism
Interface Modulation and Optimization of Electrical Properties of HfGdO/GaAs Gate Stacks by ALD-Derived Al2O3 Passivation Layer and Forming Gas Annealing
期刊论文
ADVANCED ELECTRONIC MATERIALS, 2018, 卷号: 4, 期号: 4, 页码: 9
作者:
Jiang, Shanshan
;
He, Gang
;
Liu, Mao
;
Zhu, Li
;
Liang, Shuang
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  |  
浏览/下载:65/0
  |  
提交时间:2019/06/10
electrical properties
forming gas annealing
high-k gate dielectrics
interface chemistry
metal-oxide-semiconductor capacitors
Interface Modulation and Optimization of Electrical Properties of HfGdO/GaAs Gate Stacks by ALD‐Derived Al2O3 Passivation Layer and Forming Gas Annealing
期刊论文
Advanced Electronic Materials, 2018, 卷号: Vol.4 No.4
作者:
Wendong Li
;
Shuang Liang
;
Li Zhu
;
Mao Liu
;
Mingliang Tian
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  |  
浏览/下载:44/0
  |  
提交时间:2019/04/22
electrical
properties
forming
gas
annealing
high‐k
gate
dielectrics
interface
chemistry
metal‐oxide‐semiconductor
capacitors
Atomic-layer-deposited AlO passivation dependent interface chemistry, band alignment and electrical properties of HfYO/Si gate stacks
期刊论文
Journal of Materials Science & Technology, 2018
作者:
Die Wang
;
Shuang Liang
;
Fen Qiao
;
Gang He
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/04/24
AlOpassivation
layer
Co-sputtering
HYO
films
Annealing
Electrical
properties
Conduction
mechanism
Comprehensive investigation of the interfacial charges and dipole in GeOx/ALO gate stacks of Ge MOS capacitor by postdeposition annealing
期刊论文
JAPANESE JOURNAL OF APPLIED PHYSICS, 2018, 卷号: Vol.57 No.10
作者:
Zhou, Lixing
;
Wang, Xiaolei
;
Ma, Xueli
;
Han, Kai
;
Wang, Yanrong
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2019/12/26
Mobility Degradation by Remote Coulomb Scattering and Distribution of Charge and Dipole in Al2O3/GeOx Gate Stacks of Ge Based MOSFET
会议论文
作者:
Xiang JJ(项金娟)
;
Zhou LX(周丽星)
;
Wang XL(王晓磊)
;
Zhao C(赵超)
;
Ye TC(叶甜春)
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2018/07/26
Effects of Annealing Ambient on Interface Charge and Dipole in GeOx/Al2O3 Gate Stacks of Ge Based MOSCAP
会议论文
作者:
Wang XL(王晓磊)
;
Xiang JJ(项金娟)
;
Zhao C(赵超)
;
Wang WW(王文武)
;
Ye TC(叶甜春)
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2018/07/26
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