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Atomic-layer-deposited AlO passivation dependent interface chemistry, band alignment and electrical properties of HfYO/Si gate stacks 期刊论文
Journal of Materials Science & Technology, 2019, 卷号: Vol.35 No.5, 页码: 769-776
作者:  Die Wang;  Shuang Liang;  Fen Qiao;  Gang He
收藏  |  浏览/下载:9/0  |  提交时间:2019/04/24
Atomic-layer-deposited (ALD) Al2O3 passivation dependent interface chemistry, band alignment and electrical properties of HfYO/Si gate stacks 期刊论文
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2019, 卷号: 35, 期号: 5, 页码: 769-776
作者:  Liang, Shuang[1];  He, Gang[2];  Wang, Die[3];  Qiao, Fen[4]
收藏  |  浏览/下载:52/0  |  提交时间:2019/12/24
Atomic-layer-deposited AlO passivation dependent interface chemistry, band alignment and electrical properties of HfYO/Si gate stacks 期刊论文
Journal of Materials Science & Technology, 2018
作者:  Die Wang;  Shuang Liang;  Fen Qiao;  Gang He
收藏  |  浏览/下载:3/0  |  提交时间:2019/04/24


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