×
验证码:
换一张
忘记密码?
记住我
CORC
首页
科研机构
检索
知识图谱
申请加入
托管服务
登录
注册
在结果中检索
科研机构
清华大学 [25]
兰州理工大学 [15]
大连理工大学 [9]
上海光学精密机械研究... [8]
厦门大学 [7]
北京大学 [6]
更多...
内容类型
期刊论文 [71]
会议论文 [18]
学位论文 [10]
其他 [4]
发表日期
2019 [1]
2018 [8]
2017 [2]
2016 [7]
2015 [3]
2014 [4]
更多...
学科主题
Electroche... [2]
光学工程 [2]
Applied [1]
Electrical... [1]
Electroche... [1]
Engineerin... [1]
更多...
×
知识图谱
CORC
开始提交
已提交作品
待认领作品
已认领作品
未提交全文
收藏管理
QQ客服
官方微博
反馈留言
浏览/检索结果:
共103条,第1-10条
帮助
已选(
0
)
清除
条数/页:
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
排序方式:
请选择
作者升序
作者降序
题名升序
题名降序
发表日期升序
发表日期降序
提交时间升序
提交时间降序
Manufacturing and testing of surface modified silicon carbide aspheric mirror
会议论文
Chengdu, China, 2018-06-26
作者:
Ding, Jiao Teng
;
Fan, Xue Wu
;
Pang, Zhi Hai
;
Feng, Liang Jie
;
Chen, Qin Fang
收藏
  |  
浏览/下载:36/0
  |  
提交时间:2019/03/22
Investigation of effects of pattern structures arrangement on chemical mechanical polishing process
会议论文
Shanghai, China, March 11, 2018 - March 12, 2018
作者:
Wu, Lixiao
;
Hahn, Sookap
;
Yan, Changfeng
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2020/11/15
Chemical mechanical polishing
Pressure distribution
Semiconductor device manufacture
Signal processing
Silicon wafers
Textile printing
Chemical-mechanical polishing process
Contact pressure distribution
Pattern arrangement
Pattern structure
Polishing processs
Splitting signals
Self-Powered Force Sensor Based on Thinned Bulk PZT for Real-Time Cutaneous Activities Monitoring
期刊论文
IEEE Electron Device Letters, 2018, 卷号: 39, 期号: 8, 页码: 1226-1229
作者:
Yi, Zhiran
;
Yang, Hanjia
;
Tian, Yingwei
;
Dong, Xiaoxue
;
Liu, Jingquan
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2018/12/28
Improvement and application of pad conditioning accuracy in chemical mechanical polishing
期刊论文
Optical Engineering, 2018, 卷号: 57
作者:
Ban, Xinxing
;
Zhao, Huiying
;
Zhu, Xueliang
;
Zhao, Shijie
;
Xie, Ruiqing
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/11/26
Application process
Chemical mechanical polishing(CMP)
Density distributions
Diamond conditioners
Kinematic Analysis
Optical processing
Planarity
Process parameters
Effect of motion accuracy on material removal during the CMP process for large-aperture plane optics
期刊论文
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2018, 卷号: 94, 页码: 105-119
作者:
Zhang, C. P.
;
Zhao, H. Y.
;
Xie, R. Q.
;
Zhao, Z. X.
;
Gu, Y. W.
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/11/26
Chemical mechanical polishing
Run-out error
Stitching measurement
Uneven removal
Polishing efficiency and accuracy
Gas hydrostatic rotary table
Large-aperture optics
Effect of indentation speed on deformation behaviors of surface modified silicon: A molecular dynamics study
期刊论文
Computational Materials Science, 2018, 卷号: 155, 页码: 1-10
作者:
Chen, Juan
;
Shi, Junqin
;
Zhang, Meng
;
Peng, Weixiang
;
Fang, Liang
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/11/26
Amorphous SiO2
Amorphous structures
Chemical-mechanical polishing process
Crystalline-to-amorphous
Deformation behavior
Molecular dynamics simulations
Nanoindentation tests
Surface-modified
A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry
期刊论文
APPLIED SURFACE SCIENCE, 2018, 卷号: 427, 页码: 409-415
作者:
Zhang, Zhenyu
;
Shi, Zhifeng
;
Du, Yuefeng
;
Yu, Zhijian
;
Guo, Liangchao
收藏
  |  
浏览/下载:150/0
  |  
提交时间:2018/12/04
Commercially Pure Titanium
Ti-6al-4v
Ti
Fatigue
Deposition
Surface
Layer
Steel
Films
A novel approach of chemical mechanical polishing for a titanium alloy using an environment-friendly slurry
期刊论文
APPLIED SURFACE SCIENCE, 2018, 卷号: 427, 页码: 409-415
作者:
Yu, Zhijian
;
Guo, Dongming
;
Guo, Liangchao
;
Du, Yuefeng
;
Shi, Zhifeng
收藏
  |  
浏览/下载:152/0
  |  
提交时间:2018/12/04
Commercially Pure Titanium
Ti-6al-4v
Ti
Fatigue
Deposition
Surface
Layer
Steel
Films
Roughness Reduction of Large-Area High-Quality Thick Al Coatings for Large-Size Echelle Gratings by Chemical Mechanical Polishing
期刊论文
Nanoscience and Nanotechnology Letters, 2018, 卷号: 10, 期号: 1, 页码: 69-74
作者:
Song, C.
;
Li, Z. Z.
;
Zhang, X.
;
Li, Q.
;
Yang, H. G.
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/09/17
Thick Al Coatings
Echelle Grating
Chemical Mechanical Polishing
design
telescope
mirrors
Science & Technology - Other Topics
Materials Science
Physics
Effect of Holding Time on Surface Films Formed on Molten AZ91D Alloy Protected by Graphite Powder
期刊论文
SPRINGER, 2017, 卷号: 48, 期号: 5, 页码: 2334-2342
作者:
Li, Weihong
;
Zhou, Jixue
;
Ma, Baichang
;
Wang, Jinwei
;
Wu, Jianhua
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2018/01/10
©版权所有 ©2017 CSpace - Powered by
CSpace