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西安交通大学 [5]
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会议论文 [12]
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A Novel CMUT-Based Resonant Biochemical Sensor Using Electrospinning Technology
期刊论文
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2019, 卷号: 66, 页码: 7356-7365
作者:
Zhao, Libo
;
Zhao, Yihe
;
Xia, Yong
;
Li, Zhikang
;
Li, Jie
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/30
Capacitive micromachined ultrasonic transducer (CMUT)-based resonant biochemical sensor
electrospinning technology
impedance characteristics
resonant frequency shift
volume sensitivity
Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure
期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2018, 卷号: 281, 页码: 1-8
作者:
Li, Zhenhao
;
Na, Shuai
;
Chen, Albert I. H.
;
Wong, Lawrence L. P.
;
Sun, Zhendong
收藏
  |  
浏览/下载:31/0
  |  
提交时间:2018/11/16
Capacitive micromachined ultrasonic transducer
Adhesive wafer bonding
Photosensitive benzocyclobutene
Resonator
Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization
期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2018, 卷号: 27, 期号: 3, 页码: 538-546
作者:
Zheng, Zhou
;
Na, Shuai
;
Chen, Albert I. -Hsiang
;
Li, Zhenhao
;
Wong, Lawrence L. P.
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2018/07/30
Annular element
capacitive micromachined ultrasonic transducer (CMUT)
concentric
deep reactive-ion etching
dual-element
hybrid transducer
Monolithic Multiband CMUTs for Photoacoustic Computed Tomography with In Vivo Biological Tissue Imaging
期刊论文
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2018, 卷号: 65, 期号: 3, 页码: 465-475
作者:
Pun, Sio Hang
;
Yu, Yuanyu*
;
Zhang, Jian
;
Wang, Jiujiang
;
Cheng, Ching-Hsiang
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/12/04
Capacitive micromachined ultrasonic transducer (CMUT)
multiband CMUT
photoacoustic computed tomography (PACT)
Glass-SOI-Based Hybrid-Bonded Capacitive Micromachined Ultrasonic Transducer With Hermetic Cavities for Immersion Applications
期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2016, 卷号: 25, 期号: 5
作者:
Miao, Jing
;
Wang, Hui
;
Li, Peng
;
Shen, Wenjiang(沈文江)
;
Xue, Chenyang
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2017/03/11
Finite Element Simulation and Analysis of Capacitive Micromachined Ultrasonic Transducer
会议论文
International Conference on Electrical Engineering and Automation (ICEEA)
作者:
Guo, Qing[1]
;
Gao, Shang[2]
;
Li, Yan[3]
;
Zhang, Pei-yu[4]
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/23
Capacitive micromachined ultrasonic transducer
Simulation
Resonant frequency
Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study
期刊论文
AIP ADVANCES, 2015, 卷号: 5, 期号: [db:dc_citation_issue]
作者:
Li, Zhikang
;
Zhao, Libo
;
Jiang, Zhuangde
;
Akhbari, Sina
;
Ding, Jianjun
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2019/12/02
Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient
期刊论文
Micro & Nano Letters, 2015, 卷号: 10, 期号: 10, 页码: 4
作者:
Miao, J(苗静)
;
Shen, WJ(沈文江)
;
He, CD
;
Xue, CY
;
Xiong, JJ
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  |  
浏览/下载:80/0
  |  
提交时间:2015/12/31
silicon
elemental semiconductors
silicon-on-insulator
wafer bonding
electromechanical effects
ultrasonic transducers
capacitive transducers
micromechanical devices
micromachining
vibrations
membranes
finite element analysis
reliability
capacitance
electromechanical coupling coefficient
capacitive micromachined ultrasonic transducer
impedance matching
propagation medium
microelectromechanical system capacitive ultrasonic transducer
silicon on insulator
wafer bonding
optimum geometric dimensions
membrane mechanical vibration
electrical characteristics
finite-element analysis
operation mode
device safety
device reliability
equivalent stress
operation-collapse voltage
bottom electrodes
glass substrate surface
parallel parasitic capacitance
Si
SiO2
Capacitive Micromachined Ultrasonic Transducer for Ultra-low Pressure Detection
会议论文
作者:
Li, Zhikang
;
Zhao, Libo
;
Jiang, Zhuangde
;
Ye, Zhiying
;
Zhao, Yulong
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/03
bias voltages
ultra-low pressure
CMUT
pressure sensitivity
structure parameters
Capacitive Micromachined Ultrasonic Transducer as A Resonant Temperature Sensor
会议论文
作者:
Li, Zhikang
;
Zhao, Libo
;
Ye, Zhiying
;
Wang, Hongyan
;
Zhao, Yulong
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/10
temperature measurement
CMUT
frequency shift
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