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Trade-offs between stress control and blister avoidance in MEMS devices 其他
2019-01-01
作者:  Sun, Quansheng;  Wu, Lixiang;  Wang, Junli;  Wang, Gaofeng
收藏  |  浏览/下载：14/0  |  提交时间：2019/12/05
Optimization of residual stress of SiO2/organic silicon stacked layer prepared using inductively coupled plasma deposition 其他
2017-01-01
Hsu, Chia-Hsun; Cho, Yun-Shao; Liu, Ting-Xuan; Chang, Hsi-Wei; Lien, Shui-Yang
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
New approaches for energy saving in silicon photonics 其他
2016-01-01
Zhou, Zhiping; Deng, Qingzhong; Li, Tiantian; Li, Xinbai
收藏  |  浏览/下载：4/0  |  提交时间：2017/12/03
Fabrication and Traceable Quality Evaluation of Fine Pitch TSV with Self-integrated Micro Heater and Thermocouple 其他
2016-01-01
Guan, Yong; Zeng, Qinghua; Bian, Yuan; Zhong, Xiao; Chen, Jing; Ma, Shenglin; Zhu, Yunhui; Jin, Yufeng
收藏  |  浏览/下载：7/0  |  提交时间：2017/12/03
k.p theory of freestanding narrow band gap semiconductor nanowires 其他
2016-01-01
Luo, Ning; Liao, Gaohua; Xu, H. Q.
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Fabrication and Characterization of Fine Pitch TSV Integration with Self-aligned Backside Insulation Layer Opening 其他
2016-01-01
Guan, Yong; Zeng, Qinghua; Chen, Jing; Ma, Shenglin; Jin, Yufeng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
High Frequency Analysis and Characterization of TSVs for High-Speed Integrated Systems 其他
2016-01-01
Miao, Min; Fang, Runiu; Sun, Xin; Cui, Xiaole; Jin, Yufeng
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
Fabrication and Filling Quality Optimization of the High Density and Small Size Through Silicon Via Array for Three-dimensional Packaging 其他
2016-01-01
Guan, Yong; Zeng, Qinghua; Chen, Jing; Ma, Shenglin; Meng, Wei; Jin, Yufeng
收藏  |  浏览/下载：2/0  |  提交时间：2017/12/03
Parametric Study of DRIE Process for Enhancing the Profile-preserving Property of Square Through Silicon Via 其他
2016-01-01
Guan, Yong; Zeng, Qinghua; Chen, Jing; Ma, Shenglin; Meng, Wei; Jin, Yufeng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Enhanced Recrystallization of Ultra-Thin a-Silicon Film by 2-D Confined Lattice Regrowth 其他
2016-01-01
Zhang, Hao; Li, Ming; Chen, Gong; Yang, Yuancheng; Huang, Ru
收藏  |  浏览/下载：4/0  |  提交时间：2017/12/03

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