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Deposition of SiOx films with a capacitively-coupled plasma at atmospheric pressure 外文期刊
2007
作者:  Xu, XY;  Li, L;  Wang, SG;  Zhao, LL;  Ye, TC
收藏  |  浏览/下载:7/0  |  提交时间:2010/11/26
Photoresist etching by atmospheric pressure uniform-glow plasma 外文期刊
2007
作者:  Wang, SG;  Xu, XY;  Zhao, LL;  Ye, TC
收藏  |  浏览/下载:12/0  |  提交时间:2010/11/26
Basic characteristics of an atmospheric pressure rf generated plasma jet 外文期刊
2004
作者:  Wang, SG;  Li, HJ;  Ye, TC;  Zhao, LL
收藏  |  浏览/下载:13/0  |  提交时间:2010/11/26
Study on an atmospheric pressure plasma jet and its application in etching photo-resistant materials 外文期刊
2004
作者:  Li, HJ;  Wang, SG;  Zhao, LL;  Ye, TC
收藏  |  浏览/下载:10/0  |  提交时间:2010/11/26


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