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CHEMICAL MECHANICAL MATERIAL REMOVAL OF SILICON DIOXIDE BY A SINGLE PAD ASPERITY 会议论文
2019 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC), 2019-01-01
作者:  Yang, Shuo;  Wang, Lin;  Zhou, Ping;  Yan, Ying;  Jin, Zhuji
收藏  |  浏览/下载:16/0  |  提交时间:2019/12/02
REAXFF MOLECULAR DYNAMICS SIMULATION OF MATERIAL REMOVAL MECHANISMS DURING CMP PROCESS OF SILICA GLASS IN AQUEOUS H2O2 会议论文
2019 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC), 2019-01-01
作者:  Guo, Xiaoguang;  Chen, Chong;  Kang, Renke;  Jin, Zhuji
收藏  |  浏览/下载:12/0  |  提交时间:2019/12/02
Chemical reaction mechanism of Cu surface in aqueous H2O2MD simulations using ReaxFF reactive force field 会议论文
19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019, Bilbao, Spain, 2019-06-03
作者:  Guo, Xiaoguang;  Wang, Xiaoli;  Jin, Zhuji;  Kang, Renke;  Gao, Hang
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/02
Investigation on surface/subsurface damage mechanism in yttrium aluminum garnet crystal lapping and polishing 会议论文
19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019, Bilbao, Spain, 2019-06-03
作者:  Mu, Qing;  Jin, Zhuji;  Kang, Renke;  Zhu, Xianglong;  Han, Xiaolong
收藏  |  浏览/下载:10/0  |  提交时间:2019/12/02
Investigation on residual stress of high chromium alloy in mechanical process based on molecular dynamics 会议论文
19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019, Bilbao, Spain, 2019-06-03
作者:  Guo, Xiaoguang;  Yuan, Song;  Li, Yang;  Jin, Zhuji;  Kang, Renke
收藏  |  浏览/下载:2/0  |  提交时间:2019/12/02
Modeling and simulating of high chromium alloy based on Molecular Dynamics 会议论文
17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017, Hannover, Germany, 2017-05-29
作者:  Guo, Xiaoguang;  Li, Yang;  Jin, Zhuji;  Kang, Renke
收藏  |  浏览/下载:7/0  |  提交时间:2019/12/03
Rapid Fabrication of Eutectic Ceramic Structures by Laser Engineered Net Shaping 会议论文
18th CIRP Conference on Electro Physical and Chemical Machining (ISEM), Univ Tokyo, Hongo Campus, Tokyo, JAPAN, 2016-04-18
作者:  Niu, Fangyong;  Wu, Dongjiang;  Ma, Guangyi;  Wang, Jiangtian;  Zhuang, Juan
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/09
Effects of High Dielectric Constant Abrasives on ECMP 会议论文
2nd International Conference on Frontiers of Manufacturing and Design Science (ICFMD 2011), Taiwan, TAIWAN, 2011-12-11
作者:  Li, Weisi;  Guo, Dongming;  Jin, Zhuji;  Wang, Zhe;  Yuan, Zewei
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/13
ECMP  abrasives  TiO2  
The research on the improved CMG tool for Al2O3 ceramic 会议论文
2nd International Conference on Frontiers of Manufacturing and Design Science (ICFMD 2011), Taiwan, TAIWAN, 2011-12-11
作者:  Dai, Hengzhen;  Jin, Zhuji;  Gao, Shang;  Tao, Zhanchun;  Huo, Fengwei
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/13
Simulation Research on Diamond cutting of mold steel using SPH method 会议论文
International Conference on Optical Instruments and Technology (OIT) - Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, Beijing, PEOPLES R CHINA, 2011-11-06
作者:  Guo, Xiaoguang;  Wei, Yanjun;  Jin, Zhuji;  Guo, Dongming
收藏  |  浏览/下载:7/0  |  提交时间:2019/12/18


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