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浏览/检索结果: 共5条，第1-5条 帮助 限定条件 发表日期：2019    内容类型：会议论文     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 CHEMICAL MECHANICAL MATERIAL REMOVAL OF SILICON DIOXIDE BY A SINGLE PAD ASPERITY 会议论文 2019 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC), 2019-01-01 作者:  Yang, Shuo;  Wang, Lin;  Zhou, Ping;  Yan, Ying;  Jin, Zhuji 收藏  |  浏览/下载：16/0  |  提交时间：2019/12/02 REAXFF MOLECULAR DYNAMICS SIMULATION OF MATERIAL REMOVAL MECHANISMS DURING CMP PROCESS OF SILICA GLASS IN AQUEOUS H2O2 会议论文 2019 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC), 2019-01-01 作者:  Guo, Xiaoguang;  Chen, Chong;  Kang, Renke;  Jin, Zhuji 收藏  |  浏览/下载：12/0  |  提交时间：2019/12/02 Chemical reaction mechanism of Cu surface in aqueous H2O2MD simulations using ReaxFF reactive force field 会议论文 19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019, Bilbao, Spain, 2019-06-03 作者:  Guo, Xiaoguang;  Wang, Xiaoli;  Jin, Zhuji;  Kang, Renke;  Gao, Hang 收藏  |  浏览/下载：3/0  |  提交时间：2019/12/02 Investigation on surface/subsurface damage mechanism in yttrium aluminum garnet crystal lapping and polishing 会议论文 19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019, Bilbao, Spain, 2019-06-03 作者:  Mu, Qing;  Jin, Zhuji;  Kang, Renke;  Zhu, Xianglong;  Han, Xiaolong 收藏  |  浏览/下载：10/0  |  提交时间：2019/12/02 Investigation on residual stress of high chromium alloy in mechanical process based on molecular dynamics 会议论文 19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019, Bilbao, Spain, 2019-06-03 作者:  Guo, Xiaoguang;  Yuan, Song;  Li, Yang;  Jin, Zhuji;  Kang, Renke 收藏  |  浏览/下载：2/0  |  提交时间：2019/12/02