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Effect of methane flow rate on growth and properties of TiSi-C:H films deposited by middle-frequency magnetron sputtering 期刊论文
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2014, 卷号: 43, 期号: 10, 页码: 2305-2310
作者:  Jiang, Jinlong;  Chen, Di;  Wang, Qiong;  Huang, Hao;  Zhu, Weijun
收藏  |  浏览/下载:4/0  |  提交时间:2020/11/14
Effect of Methane Flow Rate on Growth and Properties of TiSi-C:H Films Deposited by Middle-frequency Magnetron Sputtering 期刊论文
RARE METAL MATERIALS AND ENGINEERING, 2014, 卷号: 43, 期号: 10, 页码: 2305-2310
作者:  Jiang Jinlong;  Chen Di;  Wang Qiong;  Huang Hao;  Zhu Weijun
收藏  |  浏览/下载:8/0  |  提交时间:2019/11/15
Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering 期刊论文
SURFACE AND INTERFACE ANALYSIS, 2014, 卷号: 46, 期号: 3, 页码: 139-144
作者:  Jiang, Jinlong;  Huang, Hao;  Wang, Qiong;  Zhu, Weijun;  Hao, Junying
收藏  |  浏览/下载:12/0  |  提交时间:2019/11/15
Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C: H films deposited by mid-frequency magnetron sputtering 期刊论文
Surface and Coatings Technology, 2014, 卷号: 240, 页码: 419-424
作者:  Jiang, Jinlong;  Wang, Qiong;  Huang, Hao;  Wang, Yubao;  Zhang, Xia
收藏  |  浏览/下载:5/0  |  提交时间:2020/11/14
Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C:H films deposited by mid-frequency magnetron sputtering 期刊论文
SURFACE & COATINGS TECHNOLOGY, 2014, 卷号: 240, 页码: 419-424
作者:  Jiang, Jinlong;  Wang, Qiong;  Huang, Hao;  Wang, Yubao;  Zhang, Xia
收藏  |  浏览/下载:5/0  |  提交时间:2019/11/15
Influence of applied bias voltage on the composition, structure, and properties of Ti:Si-codoped a-C:H films prepared by magnetron sputtering 期刊论文
Journal of Nanomaterials, 2014, 卷号: 2014
作者:  Jiang, Jinlong;  Wang, Qiong;  Wang, Yubao;  Xia, Zhang;  Yang, Hua
收藏  |  浏览/下载:6/0  |  提交时间:2020/11/14
Influence of Applied Bias Voltage on the Composition, Structure, and Properties of Ti:Si-Codoped a-C:H Films Prepared by Magnetron Sputtering 期刊论文
JOURNAL OF NANOMATERIALS, 2014
作者:  Jiang, Jinlong;  Wang, Qiong;  Wang, Yubao;  Xia, Zhang;  Yang, Hua
收藏  |  浏览/下载:3/0  |  提交时间:2019/11/15


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