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A NEW TECHNOLOGY FOR MAKING THE SIO2 MASK WITH SUB-MICRON GROOVES ON GAAS SUBSTRATES 期刊论文
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 卷号: 132, 期号: 9, 页码: C404-C405
CHEN,XG; REN,ZX; XU,SH; PAN,HZ; YANG,J
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