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CORC

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Dominant Loss Mechanisms of Whispering Gallery Mode RF-MEMS Resonators with Wide Frequency Coverage 期刊论文
Sensors, 2020, 卷号: 20, 期号: 24, 页码: 7017
作者:  Chen, Zeji;  Jia, Qianqian;  Liu, Wenli;  Yuan, Quan;  Zhu, Yinfang;  Yang, Jinling;  Yang, Fuhua
收藏  |  浏览/下载：8/0  |  提交时间：2021/05/21
A low feed-through 3D vacuum packaging technique with silicon vias for RF MEMS resonators 期刊论文
journal of micromechanics and microengineering, 2016, 卷号: 27, 期号: 1, 页码: 014003
Jicong Zhao; Quan Yuan; Xiao Kan; and Jinling Yang; Fuhua Yang
收藏  |  浏览/下载：13/0  |  提交时间：2017/03/16
Frequency Stability of RF-MEMS Disk Resonators 期刊论文
ieee transactions on electron devices, 2015, 卷号: 62, 期号: 5, 页码: 1603-1608
Quan Yuan; Wei Luo; Hui Zhao; Bohua Peng; Jinling Yang; Fuhua Yang
收藏  |  浏览/下载：26/0  |  提交时间：2016/04/08
Stress and resistivity controls on in situ boron doped LPCVD polysilicon films for high-Q MEMS applications 期刊论文
半导体学报, 2009, 卷号: 30, 期号: 8, 页码: 34-38
Xie Jing; Liu Yunfei; Yang Jinling; Tang Longjuan; Yang Fuhua
收藏  |  浏览/下载：22/0  |  提交时间：2010/11/23
In-situ Boron-doped Low-stress LPCVD Polysilicon for Micromechanical Disk Resonator 会议论文
9th international conference on solid-state and integrated-circuit technology, beijing, peoples r china, oct 20-23, 2008
Liu, YF; Xie, J; Yang, JL; Tang, LJ; Yang, FH
收藏  |  浏览/下载：31/0  |  提交时间：2010/03/09
FILMS  
Heavily doped polycrystalline 3C-SiC growth on SiO2/Si(100) substrates for resonator applications 会议论文
6th european conference on silicon carbide and related materials, newcastle upon tyne, england, sep, 2006
Sun, G (Sun, Guosheng); Ning, J (Ning, Jin); Liu, X (Liu, Xingfang); Zhao, Y (Zhao, Yongmei); Li, J (Li, Jiaye); Wang, L (Wang, Lei); Zhao, W (Zhao, Wanshun); Wang, L (Wang, Liang)
收藏  |  浏览/下载：87/29  |  提交时间：2010/03/29

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