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CORC

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Large range nano alignment for proximity lithography using complex grating 期刊论文
Optics and Laser Technology, 2019, 卷号: 112, 页码: 101-106
作者:  Tang, Yan;  Liu, Junbo;  Yang, Yong;  Hu, Song;  Zhao, Lixin
收藏  |  浏览/下载：7/0  |  提交时间：2021/05/06
Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression 期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2018, 卷号: 30, 期号: 4, 页码: 379-382
作者:  Deng, Qinyuan;  Liu, Junbo;  Tang, Yan;  Zhou, Yi;  Yang, Yong
收藏  |  浏览/下载：34/0  |  提交时间：2019/08/23
Large area deep subwavelength interference lithography with a 35 nm half-period based on bulk plasmon polaritons 期刊论文
OPTICAL MATERIALS EXPRESS, 2018, 卷号: 8, 期号: 2, 页码: 199-209
作者:  Liu, Hongchao;  Luo, Yunfei;  Kong, Weijie;  Liu, Kaipeng;  Du, Wenjuan
收藏  |  浏览/下载：43/0  |  提交时间：2019/08/23
High efficiency and flexible working distance digital in-line holographic microscopy based on Fresnel zone plate 期刊论文
Measurement Science and Technology, 2017, 卷号: 28, 期号: 5, 页码: 055209
作者:  Tian, Peng;  Hua, Yilei;  Yang, Fan;  Li, Fanxing;  Hu, Song
收藏  |  浏览/下载：19/0  |  提交时间：2018/11/20
Characterization of micro structure through hybrid interference and phase determination in broadband light interferometry 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 8, 页码: 2301-2306
作者:  Zhou, Yi;  Tang, Yan;  Zhu, Jiangping;  Deng, Qinyuan;  Yang, Yong
收藏  |  浏览/下载：45/0  |  提交时间：2018/11/20
Simultaneous extraction of phase and phase shift from two interferograms using Lissajous figure and ellipse fitting technology with Hilbert-Huang prefiltering 期刊论文
Journal of Optics (United Kingdom), 2016, 卷号: 18, 期号: 10, 页码: 105604
作者:  Liu, Fengwei;  Wang, Jing;  Wu, Yongqian;  Wu, Fan;  Trusiak, Maciej
收藏  |  浏览/下载：67/0  |  提交时间：2018/06/14
Four-quadrant gratings moire fringe alignment measurement in proximity lithography 期刊论文
OPTICS EXPRESS, 2013, 卷号: 21, 期号: 3, 页码: 3463-3473
作者:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng.;  Zhou, Shaolin;  Tang, Yan
收藏  |  浏览/下载：16/0  |  提交时间：2015/04/17
Single closed fringe pattern phase demodulation in alignment of nanolithography 期刊论文
OPTIK, 2013, 卷号: 124, 期号: 9, 页码: 818-823
作者:  Xu, Feng;  Hu, Song;  Yang, Yong;  Li, Jinlong;  Li, Lanlan
收藏  |  浏览/下载：16/0  |  提交时间：2015/04/17
Single closed fringe pattern phase demodulation in alignment of nanolithography 期刊论文
Optik, 2013, 卷号: 124, 期号: 9, 页码: 818-823
作者:  Xu, Feng;  Hu, Song;  Yang, Yong;  Li, Jinlong;  Li, Lanlan
收藏  |  浏览/下载：8/0  |  提交时间：2016/11/23
A single-shot common-path phase-stepping radial shearing interferometer for wavefront measurements 期刊论文
OPTICS EXPRESS, 2011, 卷号: 19, 期号: 5, 页码: 4703-4713
作者:  Gu, Naiting;  Huang, Linhai;  Yang, Zeping;  Rao, Changhui
收藏  |  浏览/下载：10/0  |  提交时间：2015/09/21

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