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浏览/检索结果: 共8条，第1-8条 帮助 限定条件 专题：长春光学精密机械与物理研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Study on a wideband, variable aperture, high resolution scatterometer for planar diffraction grating stray light measurement 期刊论文 Applied Optics, 2017, 卷号: 56, 期号: 2 作者:  Yang, J.;  R. Zhang;  L. Yin;  C. Sun and T. J. Li 收藏  |  浏览/下载：14/0  |  提交时间：2018/06/13 Error allocation of opto-mechanical system for large aperture telescope based on structure function 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2015, 卷号: 23, 期号: 1, 页码: 117-121 作者:  Yang, F.;  G.-J. Liu and Q.-C. An 收藏  |  浏览/下载：13/0  |  提交时间：2016/08/24 Method of evaluation of a mirror surface figure based on frequency domain and its application for the Giant Steerable Science Mirror of the Thirty Meter Telescope 期刊论文 Chinese Optics Letters, 2015, 卷号: 13, 期号: 4, 页码: 6 作者:  Yang, F.;  G. J. Liu;  Q. C. An and X. J. Zhang 收藏  |  浏览/下载：12/0  |  提交时间：2016/07/15 Large aperture telescope mirror figure evaluation with power spectral density 期刊论文 Guangzi Xuebao/Acta Photonica Sinica, 2015, 卷号: 44, 期号: 1 作者:  An, Q.-C.;  J.-X. Zhang;  F. Yang;  L.-M. Zhang and X.-Y. Liu 收藏  |  浏览/下载：16/0  |  提交时间：2016/08/24 Analysis of power spectral density as a performance metric for TMT M3 会议论文 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, AOMATT 2014, April 26, 2014 - April 29, 2014, Harbin, China Yang F.; An Q.-C.; Wang F.-G.; Liu X.-Y. 收藏  |  浏览/下载：13/0  |  提交时间：2015/04/27 Ultra-smooth polishing of high-precision optical surface 期刊论文 Optik, 2013, 卷号: 124, 期号: 24 Ma Z.; Peng L.; Wang J. 收藏  |  浏览/下载：9/0  |  提交时间：2014/05/14 Ion Beam Figuring fabricate effect with different removal sizes 会议论文 Asia Pacific Conference on Optics Manufacture 2012, APCOM 2012, August 26, 2012 - August 28, 2012, Changchun, China Gu Y. Q. 收藏  |  浏览/下载：20/0  |  提交时间：2014/05/15 Roughness analysis of optical surfaces by X-ray scattering (EI CONFERENCE) 会议论文 2011 International Conference on Electronics and Optoelectronics, ICEOE 2011, July 29, 2011 - July 31, 2011, Dalian, China Meng Y.; Chen B.; Chen C. 收藏  |  浏览/下载：17/0  |  提交时间：2013/03/25 A grazing incidence x-ray scattering (XRS) method  Order perturbation theory (FOPT)  is stated briefly and an experimental facility based on an improved X-ray diffraction has been introduced  which can work with high performance. The x-ray scattering distributions of two super smooth silicon samples measured at the incidence angle 0.2 degree  as the x-ray wavelength is 0.154 nm  have been given and analyzed by the FOPT to give information about the surface profiles. As a comparison  the root mean square (RMS) surface roughness  grey-scale maps and one-dimensional power spectral density (1D PSD) have been derived from the atomic-force microscope (AFM) data. The results evaluated by FOPT are in good agreement with that of AFM  which indicates that x-ray scattering method is a practical characterization for the investigation of super smooth surfaces. 2011 IEEE.