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Self-aligned, gated bulk molybdenum field emitter arrays 其他
2016-01-01
Zhu, Ningli; Xu, Kaisi; Zhai, Yusheng; Tao, Zhi; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
A metal-oxide-semiconductor radiation dosimeter with a thick and defect-rich oxide layer 期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016
Liu, Hongrui; Yang, Yuhao; Zhang, Jinwen
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
Gold nanoparticle-coated silicon cone array for surface-enhanced Raman spectroscopy 期刊论文
SPECTROSCOPY LETTERS, 2016
Lai, Chun-Hong; Chen, Gang; Chen, Li; Zhang, XiaoSheng; Zhang, HaiXia; Xu, Yi
收藏  |  浏览/下载：8/0  |  提交时间：2017/12/03
SELF-ALIGNED, GATED BULK MOLYBDENUM FIELD EMITTER ARRAYS 其他
2016-01-01
Zhu, Ningli; Xu, Kaisi; Zhai, YuSheng; Tao, Zhi; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Fabrication and Characterization of Fine Pitch TSV Integration with Self-aligned Backside Insulation Layer Opening 其他
2016-01-01
Guan, Yong; Zeng, Qinghua; Chen, Jing; Ma, Shenglin; Jin, Yufeng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Fabrication and Filling Quality Optimization of the High Density and Small Size Through Silicon Via Array for Three-dimensional Packaging 其他
2016-01-01
Guan, Yong; Zeng, Qinghua; Chen, Jing; Ma, Shenglin; Meng, Wei; Jin, Yufeng
收藏  |  浏览/下载：2/0  |  提交时间：2017/12/03
Parametric Study of DRIE Process for Enhancing the Profile-preserving Property of Square Through Silicon Via 其他
2016-01-01
Guan, Yong; Zeng, Qinghua; Chen, Jing; Ma, Shenglin; Meng, Wei; Jin, Yufeng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Fabrication and characterization of a tungsten microneedle array based on deep reactive ion etching technology 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2016
Ma, Shenglin; Xia, Yanming; Wang, Yaohua; Ren, Kuili; Luo, Rongfeng; Song, Lu; Chen, Xian; Chen, Jing; Jin, Yufeng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/04
Formation mechanism of multi-functional black silicon based on optimized deep reactive ion etching technique with SF6/C4F8 期刊论文
science china technological sciences, 2015
Zhu FuYun; Zhang XiaoSheng; Zhang HaiXia
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/10
Fabrication and characterization of the functional parylene-C film with micro/nano hierarchical structures 期刊论文
微电子工程, 2015
Zhang, Xiao-Sheng; Su, Zong-Ming; Han, Meng-Di; Meng, Bo; Zhu, Fu-Yun; Zhang, Hai-Xia
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/10

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