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在预刻蚀的衬底上通过分子束外延直接生长出拓扑绝缘体薄膜的微器件 期刊论文
2016, 2016
韦庞; 李康; 冯硝; 欧云波; 张立果; 王立莉; 何珂; 马旭村; 薛其坤; Wei Pang; Li Kang; Feng Xiao; Ou Yun-Bo; Zhang Li-Guo; Wang Li-Li; He Ke; Ma Xu-Cun; Xue Qi-Kun
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Fabrication of Si/sub 3/N/sub 4/ micro-components by a combined microfabrication process 会议论文
Key Engineering Materials, International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites (ISASC 2004), Gyeongju, South Korea, INSPEC
Jing-Feng Li; Songzhe Jin; Yong Li
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Fabrication of Si3N4 micro-components by a combined microfabrication process 会议论文
ADVANCED SI-BASED CERAMICS AND COMPOSITES, International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites (ISASC 2004), Gyeongju, SOUTH KOREA, Web of Science
Li, JF; Jin, SZ; Li, Y
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Metal microstructure microfabrication technique 期刊论文
2010, 2010
Wu Ying; Zhou Zhao-ying; Jing Yong-qing; Xiang Yi; Takahito Ono
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