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| Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator 会议论文
Dalian, PEOPLES R CHINADalian, PEOPLES R CHINA, OCT 26-29, 2017OCT 26-29, 2017
作者: Ma, Wenying; Ma, Changwei; Wang, Weimin
  收藏 | 浏览/下载：48/0 | 提交时间：2019/08/23
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| CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS FOR BIOCHEMICAL DETECTION WITH FLEXIBLE HIGH SENSITIVITY 会议论文
作者: Zhao, Yihe; Lu, Dejiang; Zhao, Libo; Xia, Yong; Li, Zhikang
收藏 | 浏览/下载：2/0 | 提交时间：2019/11/26 |
| Design and Characterization of Optical Interrogated Micromachined Accelerometer 会议论文
MICRO-NANO TECHNOLOGY XVII-XVIII, 2018-01-01
作者: Feng, L. S.; Zhang, Y.; Zhang, Z. L.
收藏 | 浏览/下载：3/0 | 提交时间：2019/12/30
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| A Novel Piezoresistive Sensitive Structure for Micromachined High-pressure Sensors 会议论文
作者: Guo, Xin; Hebibul, Rahman; Jiang, Zhuangde; Zhao, Libo; Xu, Tingzhong
收藏 | 浏览/下载：2/0 | 提交时间：2019/11/26
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| Design and fabrication of micromachined pyroelectric infrared detector array using lead titanate zirconate (PZT) thin film 会议论文
作者: Zhao, Huifeng; Ren, Wei; Liu, Xuesen
收藏 | 浏览/下载：5/0 | 提交时间：2019/11/26
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| Finite Element Simulation and Analysis of Capacitive Micromachined Ultrasonic Transducer 会议论文
International Conference on Electrical Engineering and Automation (ICEEA)
作者: Guo, Qing[1]; Gao, Shang[2]; Li, Yan[3]; Zhang, Pei-yu[4]
收藏 | 浏览/下载：4/0 | 提交时间：2019/12/23
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| Simulation and Fabrication of Compounded CMUTs for Medical Application 会议论文
International Conference on Electrical, Electronics and Mechatronics (ICEEM)
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收藏 | 浏览/下载：2/0 | 提交时间：2019/12/23
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| A Novel Capacitive Micromachined Transducer for Micro-pressure Measurement 会议论文
作者: Li, Zhikang; Zhao, Libo; Hu, Yingjie; Akhbari, Sina; Jiang, Zhuangde
收藏 | 浏览/下载：10/0 | 提交时间：2019/12/02
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| Capacitive Micromachined Ultrasonic Transducers for Medical Application 会议论文
International Conference on Electrical and Electronics - Techniques and Applications (EETA), 2015-01-01
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收藏 | 浏览/下载：3/0 | 提交时间：2019/12/23
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| Research and development of micromachined gyroscopes 会议论文
3rd International Conference on Manufacturing Engineering and Technology for Manufacturing Growth (METMG 2015), 2015-01-01
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收藏 | 浏览/下载：3/0 | 提交时间：2019/12/23
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