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High performance fluoride optical coatings for DUV optics 会议论文
7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, AOMATT 2014, April 26, 2014 - April 29, 2014, Harbin, China
Zhang L.; Cai X.
收藏  |  浏览/下载：14/0  |  提交时间：2015/04/27
The facet passivation characteristic of 940nm semiconductor laser 会议论文
2013 2nd International Symposium on Quantum, Nano and Micro Technologies, ISQNM 2013, December 1, 2013 - December 2, 2013, Singapore
Li Z. J.; Zheng X. G.; Li T.; Qu Y.; Bo B. X.; Liu G. J.; Ma X. H.; Wang M.
收藏  |  浏览/下载：17/0  |  提交时间：2015/04/27
Characterization of interfacial layer of DUV coatings by spectroscopic ellipsometry 会议论文
2012 International Conference on Nanotechnology and Precision Engineering, ICNPE 2012, December 26, 2012 - December 27, 2012, Guilin, China, December 26, 2012 - December 27, 2012
Deng W.
收藏  |  浏览/下载：22/0  |  提交时间：2014/05/15
Stray light analysis of solar photoelectric detection system on space target (EI CONFERENCE) 会议论文
2012 International Conference on Intelligent System and Applied Material, GSAM 2012, January 13, 2012 - January 15, 2012, Taiyuan, Shanxi, China
Li L.-Y.; Wang Y.-F.; San X.-G.
收藏  |  浏览/下载：134/0  |  提交时间：2013/03/25
Most conventional spacious solar photoelectric detection systems suffer from unexpected stray light. This paper demonstrates the effects on photoelectric detection system bring out by stray light. On this foundation  build up evaluation index of stray light system  to search the reasonable programme to eliminating stray light. A detailed telescope system geometry model was created  and scatter models were create for telescope and enclosure components. By the means of designing the structure of main baffle  baffle vane and the coating technology. In order to verify the prosperity of structure that designed  we utilizes software to analysis opto-mechanical model. we utilizes software to analysis opto-mechanical model. The simulations show that point source transmittance of the system is thus reduced by up to two orders of magnitude between 10-8 and 10-10. Meanwhile  the experiment obtains clean detection data which satisfies the system requirements. Stray light has been suppressed effectually  and so measurement precision was improved from detection graphics. (2012) Trans Tech Publications.  
Surface modification of SiC mirror by IARE method (EI CONFERENCE) 会议论文
7th International Conference on Thin Film Physics and Applications, September 24, 2010 - September 27, 2010, Shanghai, China
Shen Z.; Gao J.
收藏  |  浏览/下载：16/0  |  提交时间：2013/03/25
A method to prepare high quality SiC coating at low temperature using large aperture E-beam evaporation PVD equipment with ion assistance was developed for the surface modification of SiC mirror for space projects. This method was called Ion Assisted Reactive Evaporation (IARE). The modified SiC coating was prepared using CH4 and Si with Kaufman ion source by IARE at 300C and it had met the requirements of applications. The SiC coating prepared by this method was amorphous. It was dense  homogeneous and easy to be polished. The surface modification of a SiC mirror was carried out using SiC coating by this method and achieved a fine surface modification effect. The surface roughness (rms) of the SiC substrate was reduced to 0.862nm  the scattering coefficient was reduced to 2.79% and the reflectance coated with Ag film was improved simultaneously after the surface modification. The effect of surface modification using SiC coating was close to that of using Si coating. It can be drawn that this technological method to preparation SiC coating for the surface modification of SiC mirror is reasonable and effective. 2011 SPIE.  
The novel facet coating technology for 808nm semiconductor laser (EI CONFERENCE) 会议论文
2010 Academic Symposium on Optoelectronics and Microelectronics Technology and 10th Chinese-Russian Symposium on Laser Physics and Laser Technology, RCSLPLT/ASOT 2010, July 28, 2010 - August 1, 2010, Harbin, China
Li Z.; Qin L.; Liu Y.; Wang L.
收藏  |  浏览/下载：17/0  |  提交时间：2013/03/25
A novel facet coating technology is presented by studying catastrophic optical mirror damage mechanism of semiconductor laser. In this technology  semiconductor laser are cleaved in the air  and the surface oxide layer is removed with a low energy ion source  flowed immediately by coating the facet with thin ZnSe layer of 20 nm. The function of this layer is to protect semiconductor laser facet  and prevent impurity particles diffusing to the facet. Finally the facet is coated with oxidative optical film. The test results show that the output power of the semiconductor laser with the ZnSe coated layer is 13% higher than that of the Si coated layer  and 47% higher than that of the oxide coated film. The device coated oxide film is damaged when current is 4.5 A  and the device coated with Si layer is damaged when current is 5.5 A  the final failed device is coated with ZnSe layer. In conclusion  the method of coating ZnSe layer on the semiconductor laser facet can prevent effectively the catastrophic optical mirror damage  and increase the output power of semiconductor lasers. 2010 IEEE.  
The automatic photoresist coating machine on the spherical surface (EI CONFERENCE) 会议论文
2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009, August 9, 2009 - August 12, 2009, Changchun, China
Li X.; Wang H.; Xu J.; Li Y.; Feng X.
收藏  |  浏览/下载：11/0  |  提交时间：2013/03/25
The photoresist coating is an important micro machining process widely applied in engineering. The formed film should be uniform and enough thin to assure the quality of final pattern whose line width is micrometer or nanometer. It is more difficult to process it on the spherical surface than on the flat. In this work  mathematic model of film thickness on the spherical surface is proposed by using hydromechanics. The key factors that influence the film thickness are obtained from the analysis of coating process. Then  the rational parameters which be controlled by the automatic photoresist coating machine can be final set up according to the result of the coating experiments. And the accuracy analysis of the key part which is used for the main process is performed by the error analytics. This machine not only makes the whole coating process automation  but also monitors the film quality in real time. It is adequate for aspheric surface also. 2009 IEEE.  
IAD-Si coatings on RB-SiC space mirrors for ultra-smooth surfaces (EI CONFERENCE) 会议论文
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China
Xu L.; Zhang X.; Li R.; Zhang F.; Wang X.
收藏  |  浏览/下载：18/0  |  提交时间：2013/03/25
To eliminate surface limitation caused by Silicon impurity in RB-SiC space mirrors  a relatively thick Si film is deposited on well finished RB-SiC substrate by a new process-ion assisted depositing (IAD) to provide a better polishable surface. Testing results of IAD-Si properties are provided  showing that the amorphous film has great thermal shock resistance. Then  polishing experiments on 100.5m thick IAD-Si layers are accomplished focusing on smoother surface. Surface figure and micro-roughness of the coating after polished reach 0.026 RMS (=0.6328nm) and less than 0.5nm RMS respectively. Moreover  reflectivity of IAD-Si polished surface with reflective films increases higher than 4.5% than that of RB-SiC in 360-1100nm. High reflectivity and desirable thermal property make IAD-Si an attractive coating material for RB-SiC space mirrors. 2009 SPIE.  
Design of optical elements for imaging the earth's plasmasphere (EI CONFERENCE) 会议论文
International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China
Wang L.-H.; Wang X.-K.; Chen B.
收藏  |  浏览/下载：21/0  |  提交时间：2013/03/25
Studying the distribution of He+ in Earth's plasmasphere by detecting its resonantly-scattered emission at 304A will record the structure and dynamics of the cold plasma in Earth's plasmasphere on a global scale. EUV imaging systems usually utilizes near normal incidence optics including multilayer mirror and filter. In this paper  the space condition of the Earth's plasmasphere to confirm the expected performance of mirror and filter for this task were analyzed and some guidelines for the design of the optical elements were introduced. In order to achieve higher response at 304A and reduce 584A radiation for the optical system  a new multilayer coating of Mo/Si with UOx (x=2-3) was developed  and it is indicated that promising filter material is Al/C with a nickel mesh. In addition  we compute the reflectance of multilayer mirror based on optical constants and the transmission of the filter based on atomic scattering factor. The results show the multilayer mirror has high reflectance of 26.27% at 304 Aand low reflectance of 0.60% at 584A. Finally  the conversion efficiency of mirror coupled with filter is 6.88% at 304A and 0.01% at 584 A.  
Automatic spin coater for concave spherical substrate (EI CONFERENCE) 会议论文
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China
Fengchao L.; Jingsong G.; Xiaoguo F.; Jingli Z.; Zhijun X.; Jun H.; Fenglin X.; Huiqing W.; Xiaohan L.
收藏  |  浏览/下载：19/0  |  提交时间：2013/03/25
Coating photoresist film with uniform thickness on concave spherical substrate (CSS) is very important for microfabrication of concave spherical optical elements by lithography technique via a laser direct writer  for the uneven photoresist film will result in ununiformity of line width so as to influence the characters of optical elements. For improving the uniformity of photoresist film coating on CSS  an automatic spin coater was designed. The process and the mathematical model of spin coating for CSS were analyzed. Difficulties for realizing the spin coater consist of the control of multi-axis motion precisely and collaboratively  valves on/ff properly and real-timely. A flexible and well-behaved spinning motion system was achieved by tmeans of principal and subordinate CPUs control. The motion program for spin coating could be created and implemented automatically while the pressure and the valves were was watched and controlled in real time. Film coating and laser direct writing experiments on a CSS with aperture equals to 100 mm and radius equals to 370 mm were performed. Photoresist film with uniform thickness on CSS was obtained by selecting proper spin coating parameters such as rotational speed  acceleration and viscosity of the photoresist. After development  the section analysis by the atomic force microscope showed that photoresist film thickness was about 517 nm in the center and about 520 nm in the edge of substrate  the film thickness error was within 1%  and the line width was about 6.0 m with steep sides parallel each other. Experimental results indicate that uniform thickness of thin photoresist film has been coated on CSS by the spin coater  which contributes to quality improvement of laser direct writing lines on CSS.  

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