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Simulation of CMP Process Based on Mixed Elastohydrodynamic Lubrication Model with 会议论文
15th International Symposium on Advances in Abrasive Technology
作者:  Zhou P(周平);  Kang RK(康仁科);  Jin ZJ(金洙吉);  Guo DM(郭东明)
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/18


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