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Error analysis of frequency mixing on heterodyne interferometry detecting device for superfinish surface scratch 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, Ninth International Symposium on Laser Metrology, Singapore, Singapore, INSPEC
Haoshan Lin; Yuhe Li; Dongsheng Wang; Mei Liu
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Error Analysis of Frequency Mixing on Heterodyne Interferometry Detecting Device for Superfinish Surface Scratch - art. no. 71552P 会议论文
NINTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY, PTS 1 AND 2, 9th International Symposium on Laser Metrology, Singapore, SINGAPORE, Web of Science
Lin, Haoshan; Li, Yuhe; Wang, Dongsheng; Liu, Mei
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