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Effect of deposition pressure on the adhesion and tribological properties of a-CNxH films prepared by DC-RF-PECVD 期刊论文
Journal of Materials Science, 2008, 卷号: 43, 页码: 645-651
作者:  Xue QJ(薛群基);  Liu WM(刘维民);  Hao JY(郝俊英)
收藏  |  浏览/下载:9/0  |  提交时间:2013/03/28
Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasms system 期刊论文
Materials and Science Engineering A, 2005, 卷号: 408, 页码: 297-302
作者:  Hao JY(郝俊英);  Liu WM(刘维民);  Liu WM(刘维民)
收藏  |  浏览/下载:10/0  |  提交时间:2014/12/23


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