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The influence of temperature on the silicon droplet evolution in the homoepitaxial growth of 4H-SiC 期刊论文
JOURNAL OF CRYSTAL GROWTH, 2018, 卷号: Vol.504, 页码: 37-40
作者:  Niu Yingxi;  Tang Xiaoyan;  Sang Ling;  Li Yun;  Kong Lingyi
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