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Modulation of the microstructure, optical, and electrical properties of HfYO gate dielectrics by annealing temperature 期刊论文
JOURNAL OF ALLOYS AND COMPOUNDS, JOURNAL OF ALLOYS AND COMPOUNDS, 2018, 卷号: Vol.735, 页码: 1427-1434
作者:  Wang,D.;  Zheng,C. Y.;  Zhu,L.;  Zhang,C.;  Liang,S.
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