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Three dimensionally integrated semiconductor systems including photoactive devices and semiconductor-on-insulator substrates, and methods of forming such three dimensionally integrated semiconductor systems 专利
专利号: US20130039615A1, 申请日期: 2013-02-14, 公开日期: 2013-02-14
作者:  NGUYEN, BICH-YEN;  SADAKA, MARIAM
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