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| Fabrication of (K,Na)NbO/sub 3/ lead-free piezoceramic microrod arrays by sol-gel processing with micromachined silicon templates 期刊论文
2010, 2010
Ying Xu; Dawei Liu; Fengping Lai; Yuhua Zhen; Jing-Feng Li
  收藏 | 浏览/下载：4/0 |
| GaN-based blue LEDs with microstructure on p-GaN surface formed by inductively coupled plasma etching 期刊论文
2010, 2010
Zhang Xian-peng; Han Yan-jun; Luo Yi; Xue Xiao-lin; Wang Lai; Jiang Yang
收藏 | 浏览/下载：3/0 |
| Improvement in power durability of Al electrode films used in SAW devices by Zr additive and Ti underlayer 期刊论文
2010, 2010
Dongmei Li; Qiang Li; Pan, F.
收藏 | 浏览/下载：5/0 |
| Gas flow simulation research on reaction chamber of ICP etcher 期刊论文
2010, 2010
Cheng Jia; Zhu Yu
收藏 | 浏览/下载：5/0 |
| Microstructure and electronic properties of Al/Zr/LiNbO/sub 3/ multilayers 会议论文
Materials Science Forum, Fifth Pacific Rim International Conference on Advanced Materials and Processing PRICM-5, Beijing, China, INSPEC
Li, D.M.; Pan, F.; Wang, X.B.; Niu, J.B.; Liu, M.
收藏 | 浏览/下载：5/0 |
| Metal microstructure microfabrication technique 期刊论文
2010, 2010
Wu Ying; Zhou Zhao-ying; Jing Yong-qing; Xiang Yi; Takahito Ono
收藏 | 浏览/下载：2/0 |
| Influence of configurations of chamber and coil on uniformity of plasma distribution for inductively coupled plasma etcher 会议论文
International Technology and Innovation Conference 2006. ITIC 2006, International Technology and Innovation Conference 2006. ITIC 2006, Hangzhou, China, INSPEC
Cheng Jia; Zhu Yu
收藏 | 浏览/下载：6/0 |
| Analysis of processing chamber flow field characteristics for an ICP etcher based on regression orthogonal design 期刊论文
2010, 2010
Cheng Jia; Zhu Yu; Duan Guanghong; Wang Chunhong
收藏 | 浏览/下载：4/0 |
| High aspect ratio copper through-silicon-vias for 3D integration 期刊论文
2010, 2010
Chongshen Song; Zheyao Wang; Qianwen Chen; Jian Cai; Litian Liu
收藏 | 浏览/下载：2/0 |
| Reactive ion etching and ion beam etching for ferroelectric memories 期刊论文
2010, 2010
Tian-Qi Shao; Tian-Ling Ren; Li-Tian Liu; Jun Zhu; Zhi-Jian Li
收藏 | 浏览/下载：4/0 |
