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Efficient mask design for inverse lithography technology based on 2D discrete cosine transformation (DCT) 会议论文
SISPAD 2007: SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES 2007, 12th International Conference on Simulation of Semiconductor Processes and Devices, Vienna, AUSTRIA, Web of Science
Zhang, Jinyu; Xiong, Wei; Tsai, Min-Chun; Wang, Yan; Yu, Zhiping
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