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DAMAGE FORMATION IN SI(100) INDUCED BY MEV SELF-ION IMPLANTATION 期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 卷号: 82, 期号: 4, 页码: 575
ZHAO, QT; WANG, ZL; XU, TB; ZHU, PR; ZHOU, JS; LIU, XD; LIU, JT; WANG, KM
收藏  |  浏览/下载:31/0  |  提交时间:2013/09/17
EFFECTS OF ION-BEAM DEFECT ENGINEERING ON CARRIER CONCENTRATION PROFILES IN 50-KEV P+-IMPLANTED SI(100) 期刊论文
APPLIED PHYSICS LETTERS, 1993, 卷号: 62, 期号: 24, 页码: 3183
ZHAO, QT; WANG, ZL; XU, TB; ZHU, PR; ZHOU, JS
收藏  |  浏览/下载:9/0  |  提交时间:2013/09/17


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