Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method

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	Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method
	Song, Weihong 1,2; Li, Shifang 1; Hou, Xi 1; Wu, Fan 1; Zhao, Wenchuan 1; Wan, Yongjian 1
刊名	OPTICS AND LASERS IN ENGINEERING
	2014-03-01
卷号	54 页码:49-54
关键词	Interferometry Absolute measurement Surface measurements Shift-rotation
英文摘要	We present an absolute calibration method for Fizeau interferometer with global optimized shift-rotation, which requires rotational and translational measurements. With a data matching method to decrease the alignment error of rotations and translations, the accuracy can be guaranteed. The global optimized shift-rotation method can obtain the surface deviation accurately of both the reference and test surfaces in terms of Zernike polynomials. Experiments have been implemented to verify the validity of the absolute calibration, and the results show that the reference surface deviation agrees well with the calibration result of conventional two-sphere method. Simulations were performed to evaluate the errors introduced by rotations and translations. (C) 2013 Elsevier Ltd. All rights reserved.
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Optics
研究领域[WOS]	Optics
关键词[WOS]	ZERNIKE POLYNOMIALS ; SURFACE FIGURE ; MIRROR
收录类别	SCI
语种	英语
WOS记录号	WOS:000328720700008
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/2433]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Song, Weihong,Li, Shifang,Hou, Xi,et al. Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method[J]. OPTICS AND LASERS IN ENGINEERING,2014,54:49-54.
APA	Song, Weihong,Li, Shifang,Hou, Xi,Wu, Fan,Zhao, Wenchuan,&Wan, Yongjian.(2014).Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method.OPTICS AND LASERS IN ENGINEERING,54,49-54.
MLA	Song, Weihong,et al."Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method".OPTICS AND LASERS IN ENGINEERING 54(2014):49-54.