Fabrication of chemical patterns from graphoepitaxially assembled block copolymer films by molecular transfer printing

	Fabrication of chemical patterns from graphoepitaxially assembled block copolymer films by molecular transfer printing
	Jin, Xiaosa ; Zhang, Xiaosa ; Wan, Lei ; Nealey,Paul F. ; Ji,Shengxiang
刊名	polymer
	2014
卷号	55 期号:15 页码:3278-3283
关键词	THIN-FILMS DENSITY MULTIPLICATION ORIENTATIONAL ORDER LITHOGRAPHY BLENDS TEMPLATES DOMAINS ARRAYS NANOLITHOGRAPHY NANOPARTICLES
通讯作者	ji,sx
英文摘要	fabrication of chemical patterns by electron beam lithography or extreme ultraviolet interference lithography is either low-throughput or prohibitively expensive to practice at sub-50 nm feature dimension. here we report a new high-throughput approach that combines the advantages of both graphoepitaxy and molecular transfer printing (mtp) to fabricating chemical patterns at low cost for directed assembly of block copolymers. in this new approach, a cylinder-forming block copolymer ternary blend film is directed to assemble on a topographic hsq substrate with sub-l-0, where l-0 is the natural period of the block copolymer, relief structures to increase the feature density by a factor of similar to 20, the surface domain pattern is replicated using mtp to create 1:1 chemical pattern, and then a lamellaeforming block copolymer is directed to assemble on the chemical pattern to realize high-aspect ratio manhattan type nanostructures. this combined strategy allows us to fabricate chemical patterns with feature dimension below the resolution limit of current lithographic tools. (c) 2014 elsevier ltd. all rights reserved.
收录类别	SCI
语种	英语
WOS记录号	WOS:000337992400012
内容类型	期刊论文
源URL	[http://ir.ciac.jl.cn/handle/322003/57313]
专题	长春应用化学研究所_长春应用化学研究所知识产出_期刊论文
推荐引用方式 GB/T 7714	Jin, Xiaosa,Zhang, Xiaosa,Wan, Lei,et al. Fabrication of chemical patterns from graphoepitaxially assembled block copolymer films by molecular transfer printing[J]. polymer,2014,55(15):3278-3283.
APA	Jin, Xiaosa,Zhang, Xiaosa,Wan, Lei,Nealey,Paul F.,&Ji,Shengxiang.(2014).Fabrication of chemical patterns from graphoepitaxially assembled block copolymer films by molecular transfer printing.polymer,55(15),3278-3283.
MLA	Jin, Xiaosa,et al."Fabrication of chemical patterns from graphoepitaxially assembled block copolymer films by molecular transfer printing".polymer 55.15(2014):3278-3283.