Fabrication of graphene interdigitated electrodes and all-carbon electronic devices

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Fabrication of graphene interdigitated electrodes and all-carbon electronic devices
	Xie SX(解双喜); Jiao ND(焦念东); Liu LQ(刘连庆); Tung, Steve
	2015
会议名称	10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
会议日期	April 7, 2015 - April 11, 2015
会议地点	Xi'an, China
关键词	graphene interdigitated electrodes AFM SWCNTs all-carbon dielectrophoresis
页码	314-317
中文摘要	Graphene has been widely studied because of its high mobility, superior mechanical properties and excellent thermal and chemical stability. This paper describes a novel and flexible method to fabricate graphene interdigitated electrodes and all-carbon field effect transistor (FET). In this approach, graphene is first grown by chemical vapor deposition (CVD) and assembled onto a microelectrode chip. Then, an atomic force microscopy (AFM) based mechanical machining method is employed to cut the graphene into interdigitated electrodes with nanogaps. Finally, single-walled carbon nanotubes (SWCNTs) are assembled onto the graphene interdigitated electrodes using dielectrophoresis to complete the FET device. The electrical properties of the fabricated SWCNT-graphene FET were investigated, and the I-V curves demonstrated the p-type nature of SWCNTs in the FET.
收录类别	EI ; CPCI（ISTP）
产权排序	1
会议主办者	Institute of Electrical and Electronics Engineers Inc.
会议录	2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
会议录出版者	IEEE
会议录出版地	Piscataway, NJ, USA
语种	英语
ISBN号	978-1-4673-6695-3
WOS记录号	WOS:000380505700076
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/16897]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Xie SX,Jiao ND,Liu LQ,et al. Fabrication of graphene interdigitated electrodes and all-carbon electronic devices[C]. 见:10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Xi'an, China. April 7, 2015 - April 11, 2015.