Design, Simulation and Fabrication of Triaxial MEMS High Shock Accelerometer

CORC > 烟台海岸带研究所 > 中国科学院烟台海岸带研究所 > 海岸带生物学与生物资源利用重点实验室 > 海岸带生物学与生物资源利用所重点实验室

	Design, Simulation and Fabrication of Triaxial MEMS High Shock Accelerometer
	Xie, Zhihong
刊名	JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
	2015-04
卷号	15 期号:4 页码:2952-2957
关键词	MEMS Accelerometer Three-Axis High g Piezoresistive Sense Element
ISSN号	1533-4880
通讯作者	Shen, YJ (reprint author), City Univ Hong Kong, Dept Mech & Biomed Engn, Hong Kong, Hong Kong, Peoples R China.
产权排序	[Zhang, Zhenhai; Cai, De; Li, Kejie] Beijing Inst Technol, Sch Mechatron Engn, Beijing 100081, Peoples R China; [Shi, Zhiguo] Univ Sci & Technol Beijing, Sch Comp & Commun Engn, Beijing 100083, Peoples R China; [Yang, Zhan] Soochow Univ, Jiangsu Prov Key Lab Adv Robot, Suzhou 215123, Peoples R China; [Yang, Zhan] Soochow Univ, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Suzhou 215123, Peoples R China; [Xie, Zhihong] Chinese Acad Sci, Yantai Inst Coastal Zone Res, Yantai 264003, Shandong, Peoples R China; [Zhang, Donghong] Hefei Xinxing Applicat Technol Res Inst, Hefei 230031, Peoples R China; [Shen, Yajing] City Univ Hong Kong, Dept Mech & Biomed Engn, Hong Kong, Hong Kong, Peoples R China
中文摘要	On the basis of analyzing the disadvantage of other structural accelerometer, three-axis high g MEMS piezoresistive accelerometer was put forward in order to apply to the high-shock test field. The accelerometer's structure and working principle were discussed in details. The simulation results show that three-axis high shock MEMS accelerometer can bear high shock. After bearing high shock impact in high-shock shooting test, three-axis high shock MEMS accelerometer can obtain the intact metrical information of the penetration process and still guarantee the accurate precision of measurement in high shock load range, so we can not only analyze the law of stress wave spreading and the penetration rule of the penetration process of the body of the missile, but also furnish the testing technology of the burst point controlling. The accelerometer has far-ranging application in recording the typical data that projectile penetrating hard target and furnish both technology guarantees for penetration rule and defend engineering.
学科主题	Chemistry, Multidisciplinary; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter
研究领域[WOS]	National Natural Science Foundation of China [61273346, 60903067, 31370108] ; City University of Hong Kong [7200356] ; Chinese Academy of Sciences [1103000003] ; Key Projects in the Yantai Science and Technology Pillar Program [2013JH021] ; National Defense Major Fundamental Research Program of China [C x x 20110003] ; National Defense Key Fundamental Research Program of China [A x x 20110005, A x x20132010] ; Specialized Research Fund for the Doctoral Program of Higher Education [20121101120009] ; Beijing Natural Science Foundation [4122049] ; Scientific Research Foundation for the Returned Overseas Chinese Scholars, Excellent Young Scholars Research Fund of Beijing Institute of Technology [2012YG0203] ; Program for the Fundamental Research of Beijing Institute of Technology [2013CX04031, 2011CX02023, 2014CX x x x x] ; Program of Introducing Talents of Discipline to University, China [B08043]
关键词[WOS]	3-AXIS ACCELEROMETER ; TECHNOLOGY
收录类别	SCI
语种	英语
WOS记录号	WOS:000347435100051
公开日期	2015-08-04
内容类型	期刊论文
源URL	[http://ir.yic.ac.cn/handle/133337/8509]
专题	烟台海岸带研究所_海岸带生物学与生物资源利用所重点实验室
推荐引用方式 GB/T 7714	Xie, Zhihong. Design, Simulation and Fabrication of Triaxial MEMS High Shock Accelerometer[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2015,15(4):2952-2957.
APA	Xie, Zhihong.(2015).Design, Simulation and Fabrication of Triaxial MEMS High Shock Accelerometer.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,15(4),2952-2957.
MLA	Xie, Zhihong."Design, Simulation and Fabrication of Triaxial MEMS High Shock Accelerometer".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 15.4(2015):2952-2957.