Polymeric microlens array fabricated with PDMS mold-based hot embossing

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Polymeric microlens array fabricated with PDMS mold-based hot embossing
	Liu Y. S. ; Zhang P. ; Deng Y. B. ; Hao P. ; Fan J. H. ; Chi M. B. ; Wu Y. H.
刊名	Journal of Micromechanics and Microengineering
	2014
卷号	24 期号:9 页码:8
ISSN号	ISBN/0960-1317
英文摘要	This study presents a simple, flexible and cost-effective process to fabricate microlens arrays. The polymeric microlens arrays are fabricated using a polydimethylsiloxane (PDMS) mold-based hot embossing process. The desired profile of the lens is achieved with the use of air pressure to deform the PDMS membrane. The deformation of the PDMS membrane is determined by numerical simulation. Simulation results show that the sag height of the PDMS membrane varies nearly linearly along with the change of the negative pressure. The shape of the PDMS membrane is transferred to the PDMS mold with UV curing and casting processes. Then, PDMS is used as a mold insert, and polycarbonate microlens arrays with different sag heights are fabricated with the hot embossing technique. The surface profile of the fabricated microlens keeps spherical with the variation of the sag height induced by the negative pressure. For the negative pressure -3600 and -5900 Pa, sag heights with 40 and 65 mu m are obtained and the corresponding focal lengths are changed from 1.0 to 0.6 mm. Good uniformity and imaging quality of the microlenses is confirmed by the experimentally evaluated and measured optical properties of the replica.
收录类别	SCI ; EI
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/44278]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu Y. S.,Zhang P.,Deng Y. B.,et al. Polymeric microlens array fabricated with PDMS mold-based hot embossing[J]. Journal of Micromechanics and Microengineering,2014,24(9):8.
APA	Liu Y. S..,Zhang P..,Deng Y. B..,Hao P..,Fan J. H..,...&Wu Y. H..(2014).Polymeric microlens array fabricated with PDMS mold-based hot embossing.Journal of Micromechanics and Microengineering,24(9),8.
MLA	Liu Y. S.,et al."Polymeric microlens array fabricated with PDMS mold-based hot embossing".Journal of Micromechanics and Microengineering 24.9(2014):8.