Design of frequency-shift interference fringe locking system in holographic grating exposure

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Design of frequency-shift interference fringe locking system in holographic grating exposure
	Song Y. ; Bayanheshig ; Qi X.-D. ; Zhang N. ; Tang Y.-G.
刊名	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
	2014
卷号	22 期号:2 页码:318-324
ISSN号	ISBN/1004924X
英文摘要	A frequency-shift interference fringe locking system was established to enhance the contrast of holographic grating profile and to decrease the phase shift of exposure interference fringe caused by the external environment. According to the composition and the working principle of the system, the moire pattern occurrence condition in the measuring system and its dependence on the phase change of interference fringe were analyzed and the selection method for photodetectors was given. On the basis of the system accuracy, the digital control system was self-designed including A/D conversion digit. A optical frequency shifting method was used to regulate the fringe phase, and an acousto-optic modulator was taken to correct the frequency shifter of the interference fringe movement in real time. The experimental results illustrate that the system can offer a sampling frequency of 5 kHz and can restrain the interference fringe drift and low-frequency moving below 10 Hz. The 3 value of the phase shift is below 0.12 rad, which means its phase is within 0.02 interference fringe period. The system can lock the phase of the exposure interference fringe effectively in real time, and can satisfy the requirements of the holographic grating lithography better.
收录类别	EI
语种	中文
公开日期	2015-05-27
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/43859]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Song Y.,Bayanheshig,Qi X.-D.,et al. Design of frequency-shift interference fringe locking system in holographic grating exposure[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2014,22(2):318-324.
APA	Song Y.,Bayanheshig,Qi X.-D.,Zhang N.,&Tang Y.-G..(2014).Design of frequency-shift interference fringe locking system in holographic grating exposure.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,22(2),318-324.
MLA	Song Y.,et al."Design of frequency-shift interference fringe locking system in holographic grating exposure".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 22.2(2014):318-324.