Focused-ion-beam overlay-patterning of three-dimensional diamond structures for advanced single-photon properties

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	Focused-ion-beam overlay-patterning of three-dimensional diamond structures for advanced single-photon properties
	Jiang, QQ ; Liu, DW ; Liu, GW ; Chang, YV ; Li, WC ; Pan, XY ; Gu, CZ
刊名	JOURNAL OF APPLIED PHYSICS
	2014
卷号	116 期号:4
ISSN号	0021-8979
通讯作者	Li, WC (reprint author), Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China.
中文摘要	Sources of single photons are of fundamental importance in many applications as to provide quantum states for quantum communication and quantum information processing. Color centers in diamond are prominent candidates to generate and manipulate quantum states of light, even at room temperature. However, the efficiency of photon collection of the color centers in bulk diamond is greatly reduced by refraction at the diamond/air interface. To address this issue, diamond structuring has been investigated by various methods. Among them, focused-ion-beam (FIB) direct patterning has been recognized as the most favorable technique. But it has been noted that diamond tends to present significant challenges in FIB milling, e. g., the susceptibility of forming charging related artifacts and topographical features. In this work, periodically-positioned-rings and overlay patterning with stagger-superimposed-rings were proposed to alleviate some problems encountered in FIB milling of diamond, for improved surface morphology and shape control. Cross-scale network and uniform nanostructure arrays have been achieved in single crystalline diamond substrates. High quality diamond solid immersion lens and nanopillars were sculptured with a nitrogen-vacancy center buried at the desired position. Compared with the film counterpart, an enhancement of about ten folds in single photon collection efficiency was achieved with greatly improved signal to noise ratio. All these results indicate that FIB milling through overlay patterning could be an effective approach to fabricate diamond structures, potentially for quantum information studies. (C) 2014 AIP Publishing LLC.
资助信息	National Natural Science Foundation of China [91123004, 11104334, 51272278, 61390503, 91023041]; 100 Technical Talent Program of the Chinese Academy of Sciences; National Basic Research Program (973) of China [2014CB921400]
语种	英语
公开日期	2015-04-14
内容类型	期刊论文
源URL	[http://ir.iphy.ac.cn/handle/311004/59141]
专题	物理研究所_物理所公开发表论文_物理所公开发表论文_期刊论文
推荐引用方式 GB/T 7714	Jiang, QQ,Liu, DW,Liu, GW,et al. Focused-ion-beam overlay-patterning of three-dimensional diamond structures for advanced single-photon properties[J]. JOURNAL OF APPLIED PHYSICS,2014,116(4).
APA	Jiang, QQ.,Liu, DW.,Liu, GW.,Chang, YV.,Li, WC.,...&Gu, CZ.(2014).Focused-ion-beam overlay-patterning of three-dimensional diamond structures for advanced single-photon properties.JOURNAL OF APPLIED PHYSICS,116(4).
MLA	Jiang, QQ,et al."Focused-ion-beam overlay-patterning of three-dimensional diamond structures for advanced single-photon properties".JOURNAL OF APPLIED PHYSICS 116.4(2014).