基于辨识逆模型的AFM压电驱动器迟滞性前馈校正

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	基于辨识逆模型的AFM压电驱动器迟滞性前馈校正
	王栋; 于鹏; 周磊; 刘柱; 杨洋; 董再励; 刘连庆
	2014
会议名称	11th World Congress on Intelligent Control and Automation (WCICA 2014)
会议日期	June 29 - July 4, 2014
会议地点	Shenyang, China
关键词	直接辨识逆模型原子力显微镜原子力显微镜压电陶瓷迟滞性校正
其他题名	Feedforward hysteresis calibration of piezoelectric actuator in AFM based on inverse model identification
页码	1561-1566
中文摘要	原子力显微镜(AFM)可以在纳米尺度进行观测和操作，在科学技术领域得到了广泛应用。压电陶瓷具有极高分辨率和快速响应速度，因此常用作AFM的驱动器。但压电陶瓷自身固有的迟滞非线性是影响AFM观测和操作精度的不利因素。针对AFM中压电陶瓷驱动器迟滞性问题，本文提出了一种改进的基于Prandtl-Ishlinskii (PI)模型的前馈校正方法。改进方法通过直接辨识逆模型参数，从原理上简化了PI逆模型的获取方式，消除了逆模型求取的局限性，并减小了计算量。实验证明本方法有效减小了由于迟滞性带来的误差。提高了AFM扫描成像质量。
英文摘要	Atomic force microscopy (AFM) has been widely applied in the field of science and technology because it can observe and manipulate at the nanometer scale. The piezoelectric is a regular choice for the actuator of AFM because of its high resolution and fast response. However, the intrinsic hysteresis nonlinearity weakens the accuracy of the observation and manipulation of AFM. Aiming at the hysteresis problem of the piezoelectric actuators in AFM, a modified feedforward calibration method based on the Prandtl-Ishlinskii (PI) model was proposed. By the means of identify the parameters of inverse model directly, the modified method simplify the obtaining procedure for the PI inverse model. The restriction to obtain the inverse model was removed, and the computational complexity was decreased. Experiments validate that the method is effective in reducing errors due to hysteresis, and improving AFM image quality.
收录类别	EI
产权排序	1
会议录	Proceeding of the 11th World Congress on Intelligent Control and Automation
会议录出版者	IEEE
会议录出版地	Piscataway, NJ, USA
语种	中文
ISBN号	978-1-4799-5825-2
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/15379]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	王栋,于鹏,周磊,等. 基于辨识逆模型的AFM压电驱动器迟滞性前馈校正[C]. 见:11th World Congress on Intelligent Control and Automation (WCICA 2014). Shenyang, China. June 29 - July 4, 2014.