Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering | |
Jiang JL(姜金龙)1; Huang H(黄浩)1; Wang Q(王琼)1; Zhu WJ(朱伟军)1; Hao JY(郝俊英)2; Liu WM(刘维民)2 | |
刊名 | Surface and Interface Analysis |
2014 | |
卷号 | 46期号:3页码:139-144 |
关键词 | a-C:H films co-doping microstructure tribological properties |
ISSN号 | 0142-2421 |
通讯作者 | 姜金龙 |
英文摘要 | The titanium/silicon mono- and co-doped amorphous carbon films were deposited by mid-frequency magnetron sputtering Ti target, Si target, and Ti80S20 alloy target, respectively. The effects of doped elements on the composition, surface morphology, microstructure, and mechanical and tribological properties of the films were investigated. The results reveal that the ratio of sp3 and sp2 carbon bonds of the films is regulated between 0.28 and 0.62 by a combination of Ti and Si dopant. The addition of small amounts of silicon leads to an increase in sp3 bonds and disorder degree of the sp2 carbon. The co-doped film exhibits significantly superior friction performance than the mono-doped films. The ultra-low friction (μ<0.01) was achieved under a load of 2N in ambient air with 40% RH. By comparing to the mono-and co-doped films, it is thought that the sp3/sp2 ratio of the films may play a key role for the superlow friction. |
学科主题 | 材料科学与物理化学 |
收录类别 | SCI |
资助信息 | the Natural Science Foundation of China (51105186);the Nature Science Foundation of Gansu Province (1014RJZA007);the Excellent Young Teachers Program of Lanzhou University of Technology (1010ZCX010);the Doctoral Research grant of Lanzhou University of Technology |
语种 | 英语 |
WOS记录号 | WOS:000331356900004 |
公开日期 | 2014-12-17 |
内容类型 | 期刊论文 |
源URL | [http://210.77.64.217/handle/362003/6993] |
专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
作者单位 | 1.Lanzhou Univ Technol, Dept Phys, Lanzhou 730050, Peoples R China 2.Chinese Acad Sci, State Key Lab Solid Lubricat, Lanzhou Inst Chem Phys, Lanzhou 730000, Peoples R China |
推荐引用方式 GB/T 7714 | Jiang JL,Huang H,Wang Q,et al. Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering[J]. Surface and Interface Analysis,2014,46(3):139-144. |
APA | Jiang JL,Huang H,Wang Q,Zhu WJ,Hao JY,&Liu WM.(2014).Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering.Surface and Interface Analysis,46(3),139-144. |
MLA | Jiang JL,et al."Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering".Surface and Interface Analysis 46.3(2014):139-144. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论